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Kurt J. Lesker intuitive MS Windows-based process control software is used on all three of Kurt J. Lesker ALD system platforms and conforms to SEMI E95 standards.
Kurt J. Lesker front-port loading ALD reactor chamber is designed for maximum flexibility while our versatile reactant delivery systems (RDS) can handle high and low pressure solid or liquid sources.
Learn more about our RDS and reactor chamber designs.
Kurt J. Lesker offers stand-alone ALD systems for basic research or completely integrated deposition systems for complex R&D applications. All three of Kurt J. Lesker ALD system platforms feature high speed ALD valves and integrated pumping, pressure measurement, and gas delivery packages optimized for your specific process.
Lesker KJLC Process Control Software for ALD Systems