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KEMSTREAM

VAPBOX 1500

Innovative, high power (1.7kW), non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one or two liquid inlets.

VAPBOX 500

Innovative, low cost, compact, non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one liquid inlet.

ATOKIT

Innovative injection/atomization technology for Pyrosol/Spray Pyrolysis applications and for direct installation on their vaporization or on their CVD/ALD chamber

Liquid Panels

 

For handling of air and moisture sensitive precursors, KEMSTREAM can design and manufacture liquid panels that match your specific requirements.

VAPBOX 300

DLI (Direct Liquid Injection) CVD/ALD vaporizer - Able to deliver vapors to any atmospheric pressure or vacuum CVD and ALD process

VAPBOX 4000

DLI (Direct Liquid Injection) CVD/ALD vaporizer - For very high vapor flows

Featured Products

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MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

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KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

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