DLI (Direct Liquid Injection) CVD/ALD vaporizer - For very high vapor flows

Innovative, low cost, compact, non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one liquid inlet.

Innovative, high power (1.7kW), non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one or two liquid inlets.

Pressure-less sintering furnace, 30”x 30” x 48” vacuum furnace, graphite hot zone

30” diameter x 40” high vacuum furnace; all molybdenum hot zone