Description
VBF-1600X-B is a vertical atmosphere controlled furnace with an 11" I.D. x 13"L sealed chamber and automatic bottom loading mechanism. Water-cooled SS vacuum flanges are lifted via the motor and can achieve vacuum 10-2 torr through a mechanical pump. It is designed for sintering material or annealing semiconductor wafers under vacuum or various other gas atmospheres with a temperature up to 1600°C. A programmable temperature controller, vacuum pump, and recirculating water chiller are included for immediate use.
SPECIFICATIONS
Features | - Double-layer steel casing with water cold vacuum-sealed chamber
- High purity fibrous alumina insulation for maximum energy saving
- Automatic bottom loading for easy operation
- The automatic pressure control and protection is built-in for safe operation
- Programmable temperature control up to 1600ºC
|
Power | - Single-phase 220 VAC, 50/60Hz (20 A breaker required)
- 13 KW Max.
|
Working Temperature | - 800°C - 1600°C continuously
- Temperature Uniformity: +/- 0.5°C
- Recommended heating rate: ≤10°C/min
|
Heating Elements | |
Vacuum Chamber | - Effective heating chamber size: 280 mm diameter x 300 mm H
- Vacuum sealed stainless steel chamber with fibrous alumina thermal insulation layer inside
- A water cooling jacket on the outside of the chamber and flange to protect the vacuum sealing O-rings
- One 16L/min recirculating water chiller is included ( Pic. 1)
- Vacuum ChamberBottom loaded flange driven by the electric motor for easy sample load of 50 Kg max.
- One high-quality mechanical vacuum pump is included to achieve a 10-2 torr level. (Pic. 2)
 Pic. 1 Pic. 2 |
| Control Panel | - Touch screen control panel for controlling temperature and inert gas pressure.
- Temperature control
- Eurotherm Temperature Controller inside
- 1 program, 24 segments programmed with ramping, cooling, and dwelling steps
- Built-in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection
- +/- 0.1 ºC temperature accuracy
- B-type thermal couple
- Pressure control
- Furnace purging function by manual or auto mode
- Constant pressure control can be achieved between 100 - 115 KPa
- Safety pressure release valve built-in
- Two gas flowmeters are installed in the front panel.
- PC control
- RS485 port is built-in for PC operation
-
- Please order the laptop along with the furnace from us, we will install the software and test it before shipping.
|
Overall Dimensions |  1500mm (L) x 1050mm (W) x 2040mm (H)
|
Net Weight | 500 kg |
Warranty | - One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.)
- ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty
|
Compliance | - CE Certified
- NRTL / CSA Certification is available upon request at an extra cost
-
    |
Operation Demo Video & Instructions |   |
