CF Flanged Re-Entrant Quartz Viewports

Lesker - CF Flanged Re-Entrant Quartz Viewports

CF Flanged Optical Glass Viewports Features:

• Built from the highest-quality materials to UHV standards
• Compatible with vacuum systems capable of reaching UHV levels
• Viewports should be sealed with fully annealed copper gaskets to reduce induced strain
• If the process deposits material, we strongly recommend a viewport shutter because deposits can damage and impair the optical properties of the lens.

UV Quartz Features:

• Leak Rate <2x10^-10 atm cc/sec He
• Parallelism <30 Arc Minutes
• 304L Stainless Steel Flange
• Temperature Range -100°C to 200°C
• Surface Finish 40/20
• Corning HPFS 7980 Fused Silica
• Homogeneity Grade F
• Inclusion Class 2
• Transmission >90% @ 250nm (external)

DUV Quartz Features:

• Leak Rate <2x10^-10 atm cc/sec He
• Parallelism <10 Arc Seconds
• 304L Stainless Steel Flange
• λ/4 @ 632nm Transmitted Wavefront
• Temperature Range -100°C to 200°C
• Surface Finish 20/10
• Corning HPFS 7980 Fused Silica
• Homogeneity Grade A
• Inclusion Class 0
• Transmission ≥99.8% @ 248nm (internal)

CAUTION: safety, Kurt J. Lesker / Premier Solutions strongly recommend that no viewport is exposed to a temperature ramp of greater than 2-3°C per minute, and that no viewport be exposed to direct thermal radiation. To limit thermal gradients when heating viewports, we recommend the viewing area and the flange be covered with many layers of aluminum foil to act as a reflective shield.

Dimensional Drawings

Charts

Premier Solutions Pte Ltd / Lesker CF Flanged Re-Entrant Quartz Viewports