Kurt J. Lesker OCTOS®—A fully automated cluster tool for pilot production scale processing of substrates requiring in-vacuum substrate transfer between chambers
Leading display device manufacturers use Kurt J. Lesker OCTOS to advance OLED technologies.
Kurt J. Lesker OCTOS®—A fully automated cluster tool for pilot production scale processing of substrates requiring in-vacuum substrate transfer between chambers
Leading display device manufacturers use Kurt J. Lesker OCTOS to advance OLED technologies.
- Offers exceptional layer thickness uniformity, repeatability, and reliability sought by OLED/PLED and GMR customers alike
Typical Applications
- OLED/PLED R&D or Production
- GMR Magnetic Films R&D or Production
- Photovoltaic R&D or production (PV, OPV)
- Organic Electronics
Deposition Techniques Available
- Magnetron Sputtering (RF, DC, or Pulsed DC)
- Thermal Evaporation, including Metal Inorganic Evaporation
- Organic Evaporation, including OLED/PLED, organic photovoltaic, organic TFT applications
- ALD
- Electron Beam Evaporation/li>
Process Options
- Heating
- Cooling
- Bias
- Ion Source for Substrate Cleaning/Assisted Deposition
- UHV Option
Features
- Automated entry and exit locks with multi-sample cassette
- Fully automated robotic sample transfer system
- Available with up to 6 process chambers for standard HV OCTOS platform
- Linear Sputtering Chamber – Available with Linear Magnetron Sputter Sources
- Organic Evaporation Chamber – Available with up to 9 low-temperature organic evaporation sources
- Metal Evaporation Chamber – Available with up to 4 thermal evaporation sources
- Reactive Plasma Chamber – Features parallel plate RF etching
- Mask-Changing Module – 20-mask storage capacity with mask holders
Lesker OCTOS - Automated Cluster Tool
