KEMSTREAM manufactures innovative and advanced vaporization systems and DLI vaporizers:

• Specially designed for CVD, MOCVD, ALD and all gas phase processes and precursors.

• Able to handle and vaporize most of solid and liquid precursors including low vapour   ressure, thermally labile and viscous ones.

• Working from vacuum to atmospheric pressure.

• With accurate and stable flow delivery.

KEMSTREAM provides Stand alone Injection Heads for Pyrosol and Spray Pyrolysis processes.

KEMSTREAM manufactures liquid panels especially designed for feeding vaporizers with air and moisture sensitive precursors.