Phone

(+65) 6284 3818

Email

sales@premier-sols.com

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KEMSTREAM

KEMSTREAM

KEMSTREAM manufactures innovative and advanced vaporization systems and DLI vaporizers:

• Specially designed for CVD, MOCVD, ALD and all gas phase processes and precursors.

• Able to handle and vaporize most of solid and liquid precursors including low vapour   ressure, thermally labile and viscous ones.

• Working from vacuum to atmospheric pressure.

• With accurate and stable flow delivery.

KEMSTREAM provides Stand alone Injection Heads for Pyrosol and Spray Pyrolysis processes.

KEMSTREAM manufactures liquid panels especially designed for feeding vaporizers with air and moisture sensitive precursors.

Products

VAPBOX 1500

Innovative, high power (1.7kW), non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one or two liquid inlets.

VAPBOX 500

Innovative, low cost, compact, non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one liquid inlet.

ATOKIT

Innovative injection/atomization technology for Pyrosol/Spray Pyrolysis applications and for direct installation on their vaporization or on their CVD/ALD chamber

Liquid Panels

 

For handling of air and moisture sensitive precursors, KEMSTREAM can design and manufacture liquid panels that match your specific requirements.

VAPBOX 300

DLI (Direct Liquid Injection) CVD/ALD vaporizer - Able to deliver vapors to any atmospheric pressure or vacuum CVD and ALD process

VAPBOX 4000

DLI (Direct Liquid Injection) CVD/ALD vaporizer - For very high vapor flows

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