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In 1998 KDF acquired the MRC batch and etch product lines from Tokyo Electron thus increasing our presence in hundreds of fabs and facilities around the world. To meet our customers ever changing business demands and needs, KDF continues to invest in improving the batch product line along with increasing the size of the equipment to accommodate today’s large-scale devices. KDF has designed , engineered and manufactured ten new product line batch tools since the original acquisition from MRC/TEL, these new tools allows customers to scale up to larger substrate sizes or just increase production lots while staying in the same family of system types.

In 2007 KDF launched the Ci Cluster tool, which has complimented our growing product line of sputter and etch equipment. KDF has positioned itself to serve a host of markets including Compound Semiconductor, Solar PV Photovoltaic, Flat Panel, Medical Devices, Telecomm, RF Power, Photo mask and a host of other critical military and commercial sputtering applications. KDF is the sole source OEM for the MRC batch product line of equipment. We can help sustain your current equipment or supply new sputtering tools that will take your products into the future. Technology and innovation are KDF's charter, and that is why we are the lead producer of batch inline system's.


  • Sputtering

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