Filmetrics

Filmetrics is the world’s sales leader in thin-film thickness measurement, with the mission of making thin-film measurements simple and affordable. Filmetrics is the preferred choice, with more companies counting on Filmetrics for affordable thin-film thickness measurements than on anyone else.

Today we would like to introduce two of their products:

The Profilm3D (The World’s First Affordable 3D Profilemeter)


 

The Profilm3D

P3D Scan Results (Click here to view more

The Profilm3D® uses state-of-the-art White Light Interferometry (WLI) to measure surface profiles and roughness down to 0.05µm; adding the low-cost PSI option takes the minimum vertical feature size down to 0.001µm. The newest generation of the Profilm3D offers Enhanced Roughness Mode for accurately imaging rough surfaces and highly-sloped sidewalls.

 

Model Specifications

 

ModelXY Stage Range
Profilm3D100mm x 100mm
Profilm3D-200200mm x 200mm

 

The R50 Series, Sheet Resistance Measurement


 

The Profilm3D
The Profilm3D

Filmetrics R-Series sheet resistance mapping tools marry the technology developed and perfected by KLA for over 45 years with the benchtop instrument technology developed over the last 20 years by the Filmetrics team. The R50-4PP contact four-point probe is recommended for thin metal and ion implant layers, and the R50-EC non-contact eddy current probe is recommended for thicker metal layers and soft or flexible surfaces, including:

  • Semiconductor wafer substrates
  • Glass substrates
  • Plastic (flexible) substrates
  • PCB patterned features
  • Solar Cells
  • Flat panel display layers and patterned features
  • Metal foils
Image

Model 

ModelSensor TypeMeasurement
Range
Maximum
Map
Diameter
XY Stage
Range
Maximum
Sample
Width
Maximum
Sample
Height
R50-4PPContact 4PP1mΩ/sq -
200MΩ/sq
100mm100mm x
100mm
265mm100mm
R50-ECNon-contact
eddy current
1mΩ/sq -
10Ω/sq
100mm100mm x
100mm
265mm100mm
R50-200-4PPContact 4PP1mΩ/sq -
200MΩ/sq
200mm200mm x
200mm
365mm100mm
R50-200-ECNon-contact
eddy current
1mΩ/sq -
10Ω/sq
200mm200mm x
200mm
365mm100mm