Furnace Structure | |
Power & Voltage | |
Working Temperature | - 1200 °C Max. for < 1 hour under flowing gas
- 1100 °C under flowing gas
- 1000 °C under vacuum < 1 torr
|
Max. Heating Rate | <= 10 °C /min |
Quartz tube & Thermal Block Placement | - Quartz Tube: 100 OD x 96 ID x 2000 L mm (The tube is consumable, click picture below to order spare )
- Two fibrous alumina thermal blocks are included, which must be placed on two ends of inside tube ( click pic below right )
|
Vacuum Flange | - One pair stainless steel vacuum flange is included with quick assembling flange (a outside clamp for quick installation)
- Left flange installed with needle valve with 1/4" pipe port for gas inlet (Pic below left)
- Righ flange built in K25 port and Anti-Corrosive digital vacuum gauge to connect a vacuum pump
-
|
Vaccum Level | - 5x10-3 torr by mechanical vacuum pump
- 5x10-4 torr by turbo pump
- Vacuum pump is not included. Please click picture below to order one
-
|
Heating Zone | |
| - 10 digital temperature controllers are built-in to control each heating zone independently with 30 segments programmable
- +/- 1 ºC temperature accuracy.
- 10 pcs K type thermocouples (one for each zone).
- RS485 Communications Port built in. and software included
|
Options | - You may add a multi-channel gas delivery system for CVD or atmosphere control applications (click PIC below-left to order)
- You may consider a pressure control unit to keep constant pressure (click picture below right to order)
|
Dimension (click to see detail ) | |
Net Weight | |
Warranty | One-year limited warranty for electrical parts. (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
Laptop, software & WiFi Control (Optional) | |
Compliance | - CE Certified
- NRTL (UL61010) or CSA certification isavailable at extra cost.
|
Notice | |
| - The tube furnaces with quartz/mullite tube are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
- Attention: A two stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
|
Temperature Control Instructions | |