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1100°C Max 8“OD(7.6 L)Vacuum Chamber Furnace with Feedthrough flange - VBF-1200X-H8

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VBF-1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100°C. It also can also be used as a vacuum brazing furnace.


  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  • 3 KW max. 
  • Note: Power cable included but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab  requirement

Working Temperature

  • <= 1000 °C continuously

  • Max. 1100 °C, < 30 minutes
  • Temperature Uniformity: +/- 2°C
  • Note: <= 1150 °C continuously is available upon request by GE412 grade quartz tube at the extra cost

Heating Rate

  • Max. 20°C/ min
  • Recommended. 10°C/ min

Heating Elements    

  • High-quality Ni-Cr-Al resistance wire 

Quartz Tube & Effective Heating    

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L.

  • Heating area: 7.5" ID x 8.5" Depth (7.6Liter)

  • Uniform Temperature zone:  6"Dia x 3.5" depth in center position within +/- 5ºC

  • The quartz tube is replaceable  ( click picture left to order spare tube )

Vacuum Flange

Note: The standard flange door has upgraded to feedthrough type on Feb 15, 2016.
  • Stainless steel water-cooled flange assembly with two quick-connect ports. All of the seals are provided by silicone o-rings. 
  • Multi-function of the quick-connect ports via 1/4" OD bored alumina tubes.
    • Gas inlet/outlet near the sample surface. (Fig. A, B, C)
    • Thermocouple feedthrough (Fig. A, B, C, D); Optional K type 1/4"ODx18" L 
    • Electric feedthrough. eg. Four probe resistance measurements (Fig. D)
  • One bored Al2O3 foam refractory block (190Dia *  50mm) is provided. (Fig. F)
  • Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request    (Since Apr 2016)
  • Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
      Fig. A   Fg. B     Fig. C      Fig. C     Fig. F
Gas Inlet and Outlet & Water cooling
  • One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace 
  • The inert gas can be introduced into the chamber via the inlet for purging purposes. 
  • If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.
  • A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). Please click the picture left to order the water chiller.
  • A water chiller is required for heating temperature above 500°C (thermal block is placed)
Temperature Controller      
  • NRTL certified digital temperature controller is included.
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • THE Default DB9 PC communication port included for connecting to a PC
  • Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy. 
  • Digital Pressure Gauge (optional) A gas-type independent(above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. ( Click Pic. 1 to order )
  • You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
    Pic. 1New Version front panelPic. 2
  • The sample holder is not included with the furnace. You may check Pic. 1 below to order 
  • You may order quartz wafer boat to anneal wafer up to 6" ( Pic.2)
  • Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
  • 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
        sample holder              Quartz boat for wafer                Quartz Thermal Block                        4 wires feedthrough 

Vacuum Pressure

  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10-2 torr via mechanical pump within 30 minutes without thermal Block
    • 10-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C
  • Optional: 
    • The vacuum pump and pipe are not included, please click on the picture below to order.
    • For achieving a higher vacuum level, a Turbopump is necessary. 
    • Spare sealing O-ring is available at extra cost ( click 2nd picture to left below )
    •  KF25 Right-Angle Valve for quick connection to KF25 Bellows (click the picture 3 below ).

Overall Dimensions

700mm(L) x 440mm(W) x 435mm(H)          

Net Weight

80 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x28"(W) x35"(H) 


  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.


  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.
  • Patten Number : ZL-2011-2-0102249.4 SINCE  2011-5-19


Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure <  0.2 bars 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. 
  • Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. 
  • Max. 1000°C is limited on all quartz tube furnaces to avoid the quartz tubes' deformation.
  • The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks

Operation Demo Video

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