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1100°C Three-Zone Tube Furnace w/ 8.5'' or 11" or 15" Quartz tube & Hinged Type Flange - OTF-1100X-III

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OTF-1100X-III furnace is a three-zone tube furnace with optional 8.5" or 11" or 15"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. The electrical actuator enables an easy & hassle-free lid opening. Three 30 segment programmable controllers are built-in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing, and sintering processes.


Furnace structure
  • Double-layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.  
  • Hinged type flange with water cold for sample loading at easy
  • This furnace can be used as annealing or diffusion furnace for 12" wafer uses a quartz boat 
  • Electrical lid actuator provides easy & hassle-free lid opening 
Structure schematic 11" ceramic tube。 Click to order spare Holding 8" wafer Electrical Lid Actuator
Heating zone
  • Total heating zone length 900mm 
  • Three zones: 300 mm + 300 mm + 300mm 
  • Constant temperature zone length: 350 mm (if three zones are in the same temperature within +/- 3°C)
  • Cross section Temperature tolerance: +/- 3°C
Working temperature
  • Max heating temperature: 1100°C 
  • Max heating & cooling rate: 10°C/min
  • SiC heating elements, a total of 36 pcs 
Temperature control
  • Three digital controllers with PID/self-tuning functions and 30 segments programmable.
  • Thermocouple: three K type thermocouples (one for each zone)
    Control accuracy: +/- 1°C
  • Software for PC control is available as optional ( click picture on the left to order )
  • The Eurotherm temperature controller is available within +/- 0.1ºC at the extra cost
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 program of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Fused quartz tube
  • Can accommodate 8.5" or 11" or 15" O.D quartz tube with 71" Length, please select tube size in the option bar
  • High purity quartz tube, please click the bottom left picture to view.
  • Warning: quartz tube is fragile, please handle with care. Warranty does not cover the broken tube by use
Vacuum sealing & Flange
  • A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
  • Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
  • Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve is optional for easy connection to KF40 bellows and pumps.
  • One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
Rated Voltage
  • Three Phase, 208V AC, 50/60 Hz  ( 3 phase 380V is  optional)
  • AWG 8# Power cord is included (without plug) 
Power consumption Max. 20KW (100A breaker required)
Product Dimension  2000 L x 765W x 1130 H mm
Net weight 300kg
Shipping dimension
85" x 40" x 70"
Shipping weight
1200 lbs
  • One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
  • You may order replacement quartz tube at the link below 
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • CE Certified
  • NRTL or NRTLCSA Certification is available upon request at the extra cost
Operation Instructions     
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar 
  • Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube

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