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1100C PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC & Vacuum Pump - OTF-1200X-S-II-PEC4

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OTF-1200X-S-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump.  Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

(Item number has been updated from OTF-1200X-S-II-4CV-PE since March 2019)



System Structure
  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature. ( Plasma generator is at the right side of Pic )
  • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity.
  • Four-channel gas mixing station with MFCs provide precise control of gas delivery.
  • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you to sublimate solid precursors for the needs of Hybrid Physical-Chemical processing.
Two-Zone Rotary Furnace
  • Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating.
  • Two PID temperature controllers with 30 segments programmable.
  • Input Power: 208 – 240 VAC, single phase at max. 1.5KW.
  • High purity Alumina fibrous insulation for max. energy saving.
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM.
  • Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone.
Plasma RF Power Supply
  • Output Power:           5 -300W adjustable with ± 5% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      100W max.
  • Matching:                  Automatic.
  • Power:                      208-240VAC, Single Phase, 50Hz.
Evaporation Boat  
  • Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating 
  • 0.7ml alumina crucible with tungsten heating coil surrounded.
  • K type thermocouple inserted for accurate temperature measurement of the source material.
  • Working current: <= 30 A.
Sealing Flanges
  • Standard:  2'' O.D Fused quartz processing tube, please click the pic on the left for details.
  • One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use.
Sealing Flanges
  • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube.
  • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines).
Tube Rotation Speed
  • 0 - 5 RPM variable.
Vacuum Pump & Gauge
  • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs.
  • KF25 adapter and stainless steel bellows are connected between the pump and tube flange.
  • 10E-2 Torr vacuum can be achieved inside the processing tube.
  • Note: Vacuum Gauge is available at additional cost, please click underline and to order.
MFC Gas Mixing Station
  • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically. 
    • MFC 1: Gas flow range from 0~100 SCCM
    • MFC 2&3: Control range from 0~200 SCCM  
    • MFC 4: Control range from 0~500 SCCM
  • Gas inlet/outlet fittings: 6mm O.D tube fitting
  • Power: 208-240VAC 50/60Hz
  • Stainless steel needle valves for manually ON/OFF control of gas supply.
  • Large PLC touch screen control enables easy flow rate settings
Temperature Control   
  • Two heating zone design with an individual temperature controller.
  • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
Dimensions & Weight
  • Furnace: 1400mm L x 600mm W x 1250mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H
  • Net weight: 400 Lbs.
  • Shipping Weight: 500lbs.
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Volumetric Feeder and Collector Tank (Optional)      pic. 1                      pic.2
  • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating. Please click the pic.1 on the left to order.
  • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details.
  • Note: contact us for customization details.
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables a user to edit temperature profile, manage heat-treatment recipe, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). 
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  • CE Certified
  • NRTL or CSA certification is available at extra cost. (pls click marks below to learn details )
Application Notes

  • The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 Mpa (Relative)
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.  
  • Never heat the furnace while the gas release valve is closed. 
  • The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
Operation Instructions

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