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1100C PECVD Rotary Furnace with Vacuum Pump - OTF-1200X-S-II-PECVD

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OTF-1200X-S-II-PECVD is a 1000ºC Rotatable Two-Zone Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) system. It consists of a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, and High-Performance Vacuum Pump.  Such a system is an excellent tool for heat-treating inorganic compound powders with surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).



System Structure
  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature
  • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity.
    Note: Gas tank is not included
Two-Zone Rotary Furnace
  • Working temp: 1100ºC Max (<1hrs), and 1000ºC for continuous heating
  • Two PID temperature controllers with 30 segments programmable
  • Input Power: 208 - 240 VAC, single phase at max. 1.5KW
  • High purity Alumina fibrous insulation for max. energy saving
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
  • Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone
Plasma RF Power Supply
  • Output Power: 5 -300W adjustable with ± 5% stability
  • RF frequency: 13.56 MHz ±0.005% stability
  • Reflection Power: 100W max.
  • Matching: Automatic
  • Power: 208-240VAC, Single Phase, 50Hz
Sealing Flanges
  • Standard: 2'' O.D Fused quartz processing tube, please click the pic on the left for details
  • One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use
Sealing Flanges
  • A pair of 1'' O.D quick disconnect flange with KF25 port is installed on each end of the tube
  • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines)
Tube Rotation Speed
  • 0 - 5 RPM variable
Vacuum Pump & Gauge
  • Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs
  • KF25 adapter and stainless steel bellows are connected between the pump and tube flange
  • 10E-2 Torr vacuum can be achieved inside the processing tube
  • Note: Vacuum Gauge is available at additional cost, please click underline and to order
Temperature Control
  • Two heating zone design with individual temperature controller
  • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments
  • Built-in overheating & broken thermocouple protection
  • Over-temperature protection and alarm allow for operation without attendant(s)
  • +/- 1 ºC temperature accuracy
  • Two K-type thermocouples (one for each zone)
  • RS485 Communications Port
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at an extra cost
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here
Dimensions & Weight
  • Furnace: 1400mm L x 600mm W x 1240mm H (with lid opened)
  • Net weight: 400 lbs
  • Shipping Weight: 500lbs
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Volumetric Feeder and Collector Tank (Optional)      pic. 1                      pic.2
  • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treatment. Please click the pic.1 on the left to order
  • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of the processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details
  • Note: contact us for customization details
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces
  • A wireless remote control provides up to 300 meters of operating range
  • The above features are available upon request at an extra cost (up to $1,000)
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  • CE Certified
  • NRTL or CSA certification is available at an extra cost
Application Notes
Click here to learn the installation of a gas regulator
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber
Operation Instructions

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