1150°C Dual Zone Tube Furnace: 10" GE214 Quartz Tube & Vacuum Flanges (24" heating zone) - GSL-1100X-II-10

GSL-1100X-II-10  is a two-zone 10" O.D GE214 fused quartz tube furnace with a vacuum flange. It is widely used for material or chemical lab to sinter all types of new material samples and anneal semiconductor wafers  (max. 8") under vacuum or other gas conditions. The temperature of the furnace is controlled by a high precision controller with an accuracy of +/- 0.1°C and 24 segments programmable up to 1150°C under a high vacuum.

 

SPECIFICATIONS

Furnace structure	Double layer flange with water cooling Total 24" heating zone length and 300 mm constant temperature zone. GE214 quartz tube which can reach 1150ºC under vacuum Two water cooling flange installed to keep the temperature low on the flange, water chiller needs to purchase separately. Please contact us for more information. High purity alumina fibrous insulation structure for max energy saving Hinged type flange for easy sample loading
Input voltage	208 - 240V AC Single phase
Power	8kW (50Amps Air Breaker is required)
Fused quartz tube size	One GE214 quartz tube is  included: 254 O.D x 244 I.D x 1000mm Length (10" O.D x 9.6" I.D x 40" L) The tube can hold an 8" wafer boat, pls click the picture below to order a quartz boat or flat sample order 　          Click here to choose a crucible
Heating element	NiCrAl Resistance Wire
Working Temperature	Max. heating temperature: 1150°C (< 60min)   ( Under vacuum and flowing gas) Continuous working temperature: 400 -1100°C  Max. heating/cooling rate: 20°C/min  Optional:  If upgrade to GE 214 tube, Max. working temperature can reach 1150°C
Heating zone	Two heating zones, each zone 300mm ( 12" ) long Total heating zone length: 600mm (24'') constant temperature zone: 300mm at the center (with +/-1°C) ( if set up two zones at the same temperature ) Two foam ceramic blocks with alumina coating are included, which must be placed inside the tube as shown in the picture below (Optional quartz block is available at extra cost, please click here to order)
Temperature controller	Two Eurotherm 3000 precision digital controllers with PID function and 24 segments programmable An extra  temperature monitor has the function of protection from over-temperature and broken T/C K type T/C Temperature accuracy: +/- 0.1°C Built-in RS 485 port for PC remote operation  and software is included
Vacuum &Fitting Ports	One pair of hinged type stainless steel vacuum seal flange with water cooling One mechanical gauge is included Two stainless steel needle valves & 1/4" hose fittings, KF25 vacuum port, and 1/4'' feedthrough. Vacuum pressure limit: depending on the vacuum pump. (Usually 10-2 torr by the mechanical pump, and 10-4 torr by the turbopump).
Water Chiller (Optional)	Cooling water is required. Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI. We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately here) to save water.
Product dimension	55"L x 27"W x 38" H  mm
Net weight	250Kg
Shipping dimension	68" x 60" x 55"
Shipping weight	350Kg
Warranty	One year limited warranty for the electronic and mechanical parts, excluding consumable parts such as heating elements and quartz tube.
Compliance	CE Certified NRTL or CSA certification is available upon request at an extra cost
Application Notes    Click here to learn the installation of a gas regulator.	Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar / 3 psi  Vacuum pressures may only be safely used up to 1000°C.  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
Operation Instructions & Video