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1200°C Sliding Tube Furnace (5'' OD) for Rapidly Thermal Processing - OTF-1200X-5-SL

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TF-1200X-5-SL  is a 5” sliding furnace with resistance heating and an electric sliding motor for rapid heating and cooling. It is capable of achieving a max. heating cooling rate > 10°C/s and anneals wafer of max 4" diameter up to 1200oC.


Furnace Structure

  • A double-layer steel casing with air cooling that ensures the furnace can be used at 1200oC continuously
  • Separated temperature control unit for remote operation
  • 200 mm length heating zone with 75 mm constant temperature zone with +/- 2ºC
  • One set of sliding rails is installed which allows the furnace to move from one side to the other side automatically at variable speeds using the control knob.
  • Vacuum flanges and the digital vacuum gauge are installed for immediate use.
  • Quartz tube: 5" quartz tube (130mm O.D x 120mm I.D x 1400mmL) is included with airtight flanges
  • Annealing wafer up to 4" diameter max. with quartz boat
  • Click The picture below to see furnace specs


  • AC 208-240V Single Phase, 50/60 Hz
  • 3.5 KW

Working Temperature

  • 1200oC Max.  < 2 hrs
  • 1100 oC or less : continuous

Sliding Control

  • Dual sliding rails made of Cr plated steel
  • Sliding rail length: 1200 mm
  • Sliding driven by DC motor
  • Automatic sliding is controlled by the temperature controller.  When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.
    • Sliding Range: 340mm
    • Sliding Speed: 0-70 mm/s; adjustable

Temperature Controller

  • Two PID automatic controllers with 30 programmable segments for control of heating  & cooling rate, and dwell time.
  • Built-in overheating & thermocouple broken protection.
  • Two thermal couples are included: one for furnace temperature control, and one for record heating and cooling rate
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • PC Control:  
    • An MTS-02 control module is included for PC control on this furnace.
    • A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.  

Heating and Cooling Rate

  • Rapid heating is achieved by sliding a preheated to sample area
    • Max. heating rate is about 10ºC/S
  • Rapid cooling is achieved by sliding heated furnace away from sample area and air fan cooling
    • Max. cooing rate is about 10ºC/S
  • One thermal couple is inserted to the sample area and records the curves of heating and cooling via software

Vacuum Flanges

  • Stainless steel vacuum flanges are installed on both ends of the tube.
  • Right flange:
    • Hinge-type flange for easy sample loading
    • 1/4"diameter  feedthrough for inserting  K-type thermal couple
    • Needle valve with barb gas fitting is built-in
  • Left flange:
    • The digital vacuum gauge is included
    • KF25 right angle valve is installed for connecting to a vacuum pump
    • A needle valve for vacuum release is included

Vacuum Level 

  •  Limited by a vacuum pump
    • 10^-2 torr can be achieved by the mechanical pump
    • 10^-4 torr can be reached by molecular pump
  •      The vacuum pump is not included, please order separately 
Flow Meter
 One flow-meter is built-in with a range: 16-160 ml/min


  • 460 x 330 x 520  mm ( furnace only)

  • 1800 x 450 x 680 mm ( furnace + sliding)
  • (click to enlarge the picture)

Net Weight

~ 80 Kg

Shipping Package Size

74" x 39" x 45"

Shipping Weight

300 lbs


One-year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below).


  • CE Certified
  • NRTL certification(UL61010) or CSA certification is available at extra cost.

Application Notes

  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  •  Vacuum pressures may only be safely used up to 1000°C

Operation Video


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