1200C Compact Magnet Driven Sliding Tube Furnace for DVD & RTP - OTF-1200X-S-DVD

Name: 1200C Compact Magnet Driven Sliding Tube Furnace for DVD & RTP - OTF-1200X-S-DVD
Brand: Premier Solutions Pte. Ltd

0.0/5 rating (0 votes)

Description

OTF-1200X-S-DVD is a compact magnet driven sliding 2" tube furnace with a max. the working temperature of 1200°C, which is designed for direct vaporizing deposition (DVD) or rapid thermal processing (RTP) under various atmospheres for 2D material growth.

SPECIFICATIONS:

Furnace Feature	One high thermal conductivity Alumina flat sample holder (2" Lx1"W) is fixed on K type sample, and the thermal couple with the sample holder can be moved inside quartz tube driven by a magnet manually to find desirable temperature position inside the tube for evaporation or deposition. One NIST certified precision temperature monitor is connected to thermal couple and sample holder via feedthrough on the vacuum flange. One magnet is embedded inside the thermal block, and another magnet is placed outside the tube. move the outside magnet can move the sample holder with the thermal couple inside the tube in or out 30 segment programmable temperature controller is installed in furnace to set up Max. working temperature up to 1200oC at the center of the furnace One small quartz crucible is included, which can be used to contain evaporation material, or please wafer on top for deposition based on your application.
Furnace Power	110VAC or 208 - 240 VAC, 50/60Hz (Please confirm voltage when place order ) 1.5 KW
Max. Temperature	1200°C (<1 hour)
Continuous Temperature	1100°C ( continuous)
Max. Heating Rate	<= 20 °C/min
Heating Zone	Heating Zone Length: 8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge. Constant Temp. Zone: 2.3" (60mm) (+/-1°C) @ 1000 °C You shall measure the furnace temperature profile for your own application before making film growth.
Temperature Controller	PID automatic control via solid-state relay with 30 steps programmable Built-in Over Temperature and Thermocouple Failure Protection Optional: The furnace may be operated by PC with installing a control module. Please order a MTS02-B control module at extra cost.
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Tube Size	2" quartz tube (50mm O.D x 44mm I.D x 1000mm L) Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating) One small quartz boats is included for placing samples or evaporation materials. Click here to choose other size crucibles
Vacuum Flanges	2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port（click picture below to see details )
Vacuum Level	10-2torr (by mechanical pump)
Fitting Ports & Optional Parts	You may need a vacuum valve at the end of vacuum port ( click picture left to order ) You may consider ordering quick connecting flange at extra cost. You may order a multi-channel gas delivery system for DVD or CVD operation.
Dimensions	With lid close: 1055mm (L) × 300mm(W) × 400mm(H) With lid open: 1055mm (L) × 300mm(W) × 560mm(H)
Net Weight	22 Kg
Shipping Package Size	48''(L) x 24''(W) x 28''(H)
Shipping Weight	120 lbs
Warranty	One year limited warranty with lift time support (Consumable parts such as processing tubes and O-rings are not covered by the warranty.
Laptop, software & WiFi Control(Optional)	Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) *Labview Based Temperature Control System (EQ-MTS01)* enables the user to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces. A wireless remote control provides up to 300 meters of operating range. The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information *Note:* The software is only compatible with MTI’s Yudian Temperature Controller
Compliance	CE Certified NRTL or CSA certification is available at extra cost. （ please click marks below to learn details )
Application Notes Click here to learn the installation of a gas regulator	Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum pressures only are safely used up to 1000°C The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube How to set up a ceramic tube and vacuum flange for MTI tube furnaces. Tube Furnace with Internal Travel Mechanism
Operation Instructions