1200C Dual Zone HPCVD Furnace with Sequential & Co-Deposition Source Feeding System up to 6 Crucibles) - OTF-1200X-II-HPCVD-SE

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Description

OTF-1200X-II-HPCVD-SE  is a hybrid PVD and CVD  ( HPCVD) deposition system with six evaporation sources for preparing multilayer 2D materials. The system consists of a dual-zone split tube furnace with the unique Source Feeding System that can drive the crucibles into a processing tube at desired evaporating temperature. The two-zone split tube furnace can achieve fast heating up to 1200°C and create a different thermal gradient by setting the different temperatures for each zone. The source feeding system can push and draw  1 or 2 crucibles with evaporation material through the atmosphere controlled the tube furnace and sequentially evaporate 6 types of materials or co-evaporating of three materials at a time as programed. This is an ideal solution to conduct HPCVD experiments, especially for preparing multi-layer 2D crystal materials. Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each source. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting.  SPECIFICATIONS:

Furnace Structure	Features a unique Dual Channel source feeding system that drives crucibles with evaporation material through the vacuum or atmosphere controlled tube, suitable for Hybrid Physical CVD-Growth of Multi-layer Film Stacks as programed. Two independent temperature controllers to control each zone's temperature. Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.   High purity fibrous alumina insulation for maximum energy saving. The special refractory coating on liner and heating element helps increase furnace service life. Split cover with Interlock protection, cut the power if the door opens during the furnace heating process.
Power Requirement	Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
Heating Zone Length	Two zones: each zone length is 8.6" (220 mm) Total 17.3" (440 mm) heating zone
Constant Temp. Zone	Constant temperature zone ( about 260mm +/-2°C ) can be created by setting both zones at the same temperature  Please click the picture below to see the detailed temperature uniformity profile at 800°C.
Temperature Range	100~1100°C (Continuous); 1200°C (<1 hour)
Max. Heating Rate	≤ 10°C /min
Sequential Source Feeding System	One thermocouple connects to the crucible from the left flange. The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring. Four crucibles can be simultaneously placed into the source feed system and sequentially delivered to the quartz tube under vacuum or inert gas conditions (or co-deposition up to 2 sources at a time, please refer to bottom right picture for details)
Crucible Movement Control	The crucible moving speed and distance are controlled by a stepper motor. Crucible traveling distance: 530mm max.
Temperature Controllers	Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time. Built-in PID Auto-Tune function with overheating & broken thermocouple protection. Over-temperature protection and alarm allow for operation without attendant(s). +/- 1ºC temperature accuracy. Two K-type thermocouples (one for each zone). RS485 Communications Port. Eurotherm 3000 controller is optional with +/- 0.1ºC accuracy at the extra cost.
Tube Accessories	Onefused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included. 4 quartz boat are included for evaporation
Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases. Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
Vacuum Pump	Double Stage Rotary Vane Vacuum Pump is included. SS vacuum pipe & ball valve with KF25 adaptor generate 1E-2 torr vacuum.
Gas Flow Control System	Three-channel Gas Control System with PLC Touchscreen is included. Three mobile carts are included to support the furnace and the revolving feed system.
Dimensions	2400mm(L) x 600mm(W) x 1300mm(H)
Warranty	One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
Laptop, software & WiFi Control (Optional)	Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces. A wireless remote control provides up to 300 meters of operating range. The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information. Note: The software is only compatible with MTI’s Yudian Temperature Controller
Compliance	CE Certified NRTL  or CSA certification is available at extra cost.
Application Notes    Click here to learn the installation of a gas regulator.	Click here to learn How to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace. ( also, click the picture below to see demo video ) Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa.Vacuum pressure may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube. Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. In order to obtain accurate temperature inside the tube furnace, please click here to learn how to calibrate temperature. You can set up the different temperature with each zone to create a thermal gradient for CVD deposition, click underline to see temperature profile with max thermal gradient under various temperatures
Operation Instructions	How to operate the furnace Controller Operation Demo Video How to create Temp. gradient