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1200C Dual Zone HPCVD Furnace with Sequential & Co-Deposition Source Feeding System up to 6 Crucibles) - OTF-1200X-II-HPCVD-SE

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OTF-1200X-II-HPCVD-SE  is a hybrid PVD and CVD  ( HPCVD) deposition system with six evaporation sources for preparing multilayer 2D materials. The system consists of a dual-zone split tube furnace with the unique Source Feeding System that can drive the crucibles into a processing tube at desired evaporating temperature. The two-zone split tube furnace can achieve fast heating up to 1200°C and create a different thermal gradient by setting the different temperatures for each zone. The source feeding system can push and draw  1 or 2 crucibles with evaporation material through the atmosphere controlled the tube furnace and sequentially evaporate 6 types of materials or co-evaporating of three materials at a time as programed. This is an ideal solution to conduct HPCVD experiments, especially for preparing multi-layer 2D crystal materials. Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each source. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting.  SPECIFICATIONS:
Furnace Structure
  • Features a unique Dual Channel source feeding system that drives crucibles with evaporation material through the vacuum or atmosphere controlled tube, suitable for Hybrid Physical CVD-Growth of Multi-layer Film Stacks as programed.
  • Two independent temperature controllers to control each zone's temperature.
  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • The special refractory coating on liner and heating element helps increase furnace service life.
  • Split cover with Interlock protectioncut the power if the door opens during the furnace heating process.
Power Requirement
  • Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
Heating Zone Length
  • Two zones: each zone length is 8.6" (220 mm)
  • Total 17.3" (440 mm) heating zone
Constant Temp. Zone
  • Constant temperature zone ( about 260mm +/-2°C ) can be created by setting both zones at the same temperature 
  • Please click the picture below to see the detailed temperature uniformity profile at 800°C. 
Temperature Range 100~1100°C (Continuous); 1200°C (<1 hour) 
Max. Heating Rate ≤ 10°C /min
Sequential Source Feeding System
  • One thermocouple connects to the crucible from the left flange. The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring.
  • Four crucibles can be simultaneously placed into the source feed system and sequentially delivered to the quartz tube under vacuum or inert gas conditions (or co-deposition up to 2 sources at a time, please refer to bottom right picture for details)
Crucible Movement Control
  • The crucible moving speed and distance are controlled by a stepper motor.
  • Crucible traveling distance: 530mm max.
Temperature Controllers
  • Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1ºC temperature accuracy.
  • Two K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Eurotherm 3000 controller is optional with +/- 0.1ºC accuracy at the extra cost.
Tube Accessories
  • Onefused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included.
  • 4 quartz boat are included for evaporation
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
Vacuum Pump
Gas Flow Control System
Dimensions    2400mm(L) x 600mm(W) x 1300mm(H)   
Warranty One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
Laptop, software & WiFi Control (Optional)     
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  • CE Certified
  • NRTL  or CSA certification is available at extra cost.
Application Notes   
Click here to learn the installation of a gas regulator.
Operation Instructions
How to operate the furnace Controller Operation Demo Video How to create Temp. gradient  

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