1200°C Dual Zone Split Tube Furnace w/ Sample Feeding System upto 4 Crucibles For HPCVD - OTF-1200X-II-ZL

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Description

OTF-1200X-II-ZL is a hybrid PVD and CVD  ( HPCVD) deposition system with four evaporation sources for preparing multilayer 2D materials up to 1200oC.  The system is consists of a dual-zone split tube furnace with the revolving sample feeding system that can drive the crucible into a processing tube at the desired temperature in the different position of the heating zone. The revolving feed system can push and draw a crucible with evaporation material through the atmosphere controlled tube furnace and sequentially evaporate the material one by one up to four crucibles as the program.  Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each sample. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting.  SPECIFICATIONS:

Furnace Structure	Two independent temperature controllers to control each zone's temperature. Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.   High purity fibrous alumina insulation for maximum energy saving. The special refractory coating on liner and heating element helps increase furnace service life. Split cover with Interlock protection, cut the power if the door opens during the furnace heating process.
Power Requirement	Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
Heating Zone Length	Two zones: each zone length is 8" (200 mm) Total 16" (400 mm) heating zone
Constant Temp. Zone	150mm (+/-1°C) for each heating zone A longer constant temperature zone ( about 250mm ) can be created by setting both zones at the same temperature  Please click the picture left to see the detailed temperature uniformity profile at 800°C
Temperature Range	100~1100°C (Continuous); 1200°C (<1 hour)
Max. Heating Rate	≤ 20°C /min
Revolving Feeding Stock System	One thermocouple connects to the crucible from the left flange (Pic.1). The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring. Four crucibles can be simultaneously placed into the revolving feed system and sequentially delivered to the quartz tube under vacuum or inert gas one by one  (Pic.2, 3 & 4).     Pic.1      Pic.2        Pic.3       Pic.4
Crucible Movement Control	The crucible moving speed and distance are controlled by a stepper motor. Crucible traveling distance: 1mm ~ 200mm
Temperature Controllers	Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time. Built-in PID Auto-Tune function with overheating & broken thermocouple protection. Over-temperature protection and alarm allow for operation without attendant(s). +/- 1ºC temperature accuracy. Two K-type thermocouples (one for each zone). RS485 Communications Port. Optional:   The furnace can be operated by PC with an MTS02-Y Temperature control software package (include 2 communication chips and one 15" laptop).  Eurotherm 3000 controllers are available with +/- 0.1ºC accuracy at the extra cost.
Tube Accessories	Onefused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included. Four quartz crucibles for evaporation are included
Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases. Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
Vacuum Pump	Double Stage Rotary Vane Vacuum Pump is included. SS vacuum pipe & ball valve with KF25 adaptor generate 1E-2 torr vacuum.
Gas Flow Control System	Three-channel Gas Control System with PLC Touchscreen is included. Three mobile carts are included to support the furnace and the revolving feed system.
Water Chiller	A 16L/min recirculating water chiller is included for cooling the flange. Short water power off and Over-temperature alarm built-in.
Dimensions	2400mm(L) x 600mm(W) x 1300mm(H)
Warranty	One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
Laptop, software & WiFi Control (Optional)	Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)  Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces. A wireless remote control provides up to 300 meters of operating range. The above features are available upon request at an extra cost (up to $1,000).
Compliance	CE Certified NRTL  or CSA certification at extra cost. (please click marks below to learn details)
Application Notes    Click here to learn the installation of a gas regulator.	Click here to learn How to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace. ( also, click the picture below to see demo video ) Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars. Vacuum pressure may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube. Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. In order to obtain accurate temperature inside the tube furnace, please click here to learn how to calibrate temperature. You can set up the different temperature with each zone to create a thermal gradient for CVD deposition, click underline to see temperature profile with max thermal gradient under various temperatures
Operation Video	How to operate the furnace Controller Operation Demo Video How to create a Temperature gradient