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1200°C Dual Zone Split Tube Furnace w/ Sample Feeding System upto 4 Crucibles For HPCVD - OTF-1200X-II-ZL

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OTF-1200X-II-ZL is a hybrid PVD and CVD  ( HPCVD) deposition system with four evaporation sources for preparing multilayer 2D materials up to 1200oC.  The system is consists of a dual-zone split tube furnace with the revolving sample feeding system that can drive the crucible into a processing tube at the desired temperature in the different position of the heating zone. The revolving feed system can push and draw a crucible with evaporation material through the atmosphere controlled tube furnace and sequentially evaporate the material one by one up to four crucibles as the program.  Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each sample. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting.  SPECIFICATIONS:
Furnace Structure
  • Two independent temperature controllers to control each zone's temperature.
  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • The special refractory coating on liner and heating element helps increase furnace service life.
  • Split cover with Interlock protectioncut the power if the door opens during the furnace heating process.       
Power Requirement
  • Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
Heating Zone Length
  • Two zones: each zone length is 8" (200 mm)
  • Total 16" (400 mm) heating zone
Constant Temp. Zone
  • 150mm (+/-1°C) for each heating zone
  • A longer constant temperature zone ( about 250mm ) can be created by setting both zones at the same temperature 
  • Please click the picture left to see the detailed temperature uniformity profile at 800°C           
Temperature Range 100~1100°C (Continuous); 1200°C (<1 hour) 
Max. Heating Rate ≤ 20°C /min
Revolving Feeding Stock System
  • One thermocouple connects to the crucible from the left flange (Pic.1). The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring.
  • Four crucibles can be simultaneously placed into the revolving feed system and sequentially delivered to the quartz tube under vacuum or inert gas one by one  (Pic.2, 3 & 4).
  •     Pic.1      Pic.2        Pic.3       Pic.4                           
Crucible Movement Control
  • The crucible moving speed and distance are controlled by a stepper motor.
  • Crucible traveling distance: 1mm ~ 200mm
Temperature Controllers
  • Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1ºC temperature accuracy.
  • Two K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace can be operated by PC with an MTS02-Y Temperature control software package (include 2 communication chips and one 15" laptop). 
    • Eurotherm 3000 controllers are available with +/- 0.1ºC accuracy at the extra cost.              
Tube Accessories
  • Onefused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included.
  • Four quartz crucibles for evaporation are included
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
Vacuum Pump
Gas Flow Control System
Water Chiller
Dimensions    2400mm(L) x 600mm(W) x 1300mm(H)   
Warranty One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). 
  • Compliance
  • CE Certified
  • NRTL  or CSA certification at extra cost. (please click marks below to learn details)
Application Notes   
Click here to learn the installation of a gas regulator.
Operation Video
How to operate the furnace Controller Operation Demo Video How to create a Temperature gradient  

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