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1200C Max. PECVD Split Tube Furnace (2" - 3.14" OD) w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV

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Description

OTF-1200X-PEC4LV is acompact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump.   The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid-state, and benefits:
  • Lower temperature processing compared to conventional CVD. 
  • Film stress can be controlled by high/low frequency mixing techniques. 
  • Control over stoichiometry via process conditions.
  • Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

Specifications:

  Split Tube furnace
 
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max for continuous heating
  • 30 segments programmable precision digital temperature controller
  • 440 mm length single heating zone and 150 mm length constant temperate zone
  • High purity quartz tube optional from ( click the optional bar to choose )
    One pair of the vacuum-sealed flange with valves
    • 2"OD x 1.7"ID x  48" Length 
    • 3.14"OD x 2.83"ID x 48'' Length
  • Input power: 208 – 240V AC input, a single phase at max. 4KW
Plasma RF Power Supply
 
     
  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power:                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens the process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detailed spec
  Vacuum Pump and valve
 
  • Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.
  •  KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
  •  Digital vacuum pressure gauge and display are installed with the furnace
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with a motorized valve and gauge. 
Optional Oilless Pump Please order the oilless pump for zero contamination:
Mass Flowmeter
    
 EQ-GSL-LCD  
  • 4-channeled Gas Mixing
  • Made of 316 stainless steel valve
  • Gas mixing tank: Φ80X120mm  
  • 600mm(L) x 745mm(W) x 700mm(H)
  • 6" color touch screen control panel to make parameter setting at easy.
  • Touchscreen Control and PC remote switchable.
  • 23W per channel
  •  AC 220V/50Hz Single phase
Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  •             
Optional
 
                               click here to choose a crucible
Overall dimensions
  • Furnace: 550mm(L) x 380mm(W) x 520mm(H) 
  • 3 Bottom Mobile case together: 1800mm(L) x 850mm(W) x 700mm(H)
Warranty 
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces.
  •     
Compliance
 
  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.
Patten Number: ZL-2011-2-0355777.1 
Operation Video

       
Warning

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM for reducing thermal shocks to the tube
Shipping Dimensions
  • Pallet #1: 48" x 40" x 65"
  • Pallet #2: 48" x 40" x 40"
  • Pallet #3: 48" x 40" x 40"
  • Pallet #4: 48" x 40" x 40"
Total Shipping Weight 1100 lbs

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