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  8. 1200C Max Sliding Tube Furnace (80mm OD) with Flanges for Fast Heating / Cooling - OTF-1200X-80-SL

Categories

CVD Furnace System | CVD Furnaces for Graphene & 2D Materials | RTP Furnaces | Tube Furnaces for Graphene and CNT Growth | ALD/CVD/PECVD/Mist CVD | RTP Furnace ( single zone up to 1100C) | RTP & Sliding Tube Furnace

1200C Max Sliding Tube Furnace (80mm OD) with Flanges for Fast Heating / Cooling - OTF-1200X-80-SL

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Description

OTF-1200X-80-SL is a slideable tube furnace with 3" IDx55" L Quartz tube and flanges and a maximum working temperature up to 1200°C. One pair of sliding rails is installed on the bottom of the furnace to allow sliding the furnace from one side to another to achieve max. heating and cooling rates up to 100°C/min. For the fastest healing, the furnace may be pre-heated to the desired temperature and then be slide to the sample's position. As for fastest cooling, the furnace can be slide to another side after sample heating is completed. Moreover, the heating and cooling rates may reach 15°C/s under vacuum or inert gasses. This furnace provides an alternative for rapid thermal processing at the lowest cost.
 

SPECIFICATIONS

Furnace Structure
  • Double-layer steel structure with dual air cooling fans 
  • One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually  moved from side to side
  • Vacuum flanges and a digital vacuum gauge are installed for immediate use.
  • Sliding rail length is about 1200mm, the furnace can slide 600 mm distance

Power

 2.5KW
Voltage AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

 1200°C (<1 hour)

Continuous Temperature

 1100°C

Heating& Cooling Rates
  Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
  7°C/sec (250°C - 350°C);
  4°C/sec (350°C - 500°C);
  3°C/sec (350°C - 550°C);
  2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
Note:
The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

440mm ( single zone )

Constant Temperature Zone

150mm (+/-3°C @ 1000°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube

High purity fused quartz tube

O.D. : 3.2" (80 mm)
I.D. : 3.0" (75 mm)
Length: 55" (1400 mm)

Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging O-ring

Temperature Controller
  • PID automatic control with 30 programmable segments with +/ - 1°C accuracy
  • Built-in over-temperature alarm and protection allow for operation without an attendant.
  • Two K-type thermal couples are included.  One is built in the furnace to control furnace temperature, and another inserted into the tube to monitor sample real temperature profile.
  • One NIST certified thermometer is included to connect to the thermal couple inside the tube. the meter has RS485 Interface with Windows Software which can record temperature profile by PC.
  • PC control module is included. 
  • Advanced Temperature Control (Optional)

 Vacuum Flanges
  • Stainless steel vacuum flanges are installed on both ends of the tube with heavy duty support. 
    • Right flange: flange, fittings for the vacuum gauge are included. The bellow, KF25 adapter, KF25 clamp are not included. 
    • Left flange: one needle valve and 1/4" thermocouple feed-through and digital vacuum gauge.
    • An 24" length x 1/4" Dia. K-type thermocouple (included) connected to an Omega temperature calibrator (included) will be inserted through this flange to monitor the heating and cooling rates of the sample's position during furnace sliding.
  • Click the pictures below to see details:
     

Right Flange

Left Flange

Temp. Calibrator

24" K-type T/C

Digital Vacuum Gauge

 Vacuum Level 
  • Limited by the pump ( pump is not included, click on pictures to order )
    • 10E-4 torr can be reached by the molecular pump
    • 10E-2 torr by a mechanical pump.
                

 Sliding Rails / Table

  • Double sliding rail made by Cr-plated steel

  • Sliding length: 1200 mm
  • One slide-stopping clamp is included for holding the position of the furnace.

 Dimensions

  •  550 x 380 x 520  mm ( furnace only)

  • 1500 x 380 x 620 mm ( furnace + sliding )

 Net Weight

~ 100 Kg

Shipping Package Size

60" x 40" x 45" (inch)

Shipping Weight

305 lbs

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost. （ please click marks below to learn details )

Application Notes

Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube Furnace.
  • If you need a faster cooling jar please click the picture below to order a Portable Spot Air Cooling Conditioner.  
  • Warning:    Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT

Operation Instructions
             

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