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1200C Three Zone HPCVD 5"D Tube Furnace with Sequential & Co-Deposition Source Feeding System up to 3 Crucibles - OTF-1200X-III-HPCVD-S3

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OTF-1200X-III-HPCVD-S3 is a hybrid PVD and CVD  ( HPCVD) deposition system for preparing multilayer 2D materials. The system consists of a three-zone split tube furnace with the unique Source Feeding System that can drive the crucible into a processing tube at desired evaporating temperature. The three-zone split tube furnace can achieve fast heating up to 1200°C and create a different thermal gradient by setting different temperatures for each zone. The source feeding system can push and draw one or three crucibles with evaporation material through the atmosphere controlled 5" D tube furnace and sequentially process up to 3 crucibles (or co-evaporating of 3 at a time) as programmed. This is an ideal solution to conduct HPCVD experiments, especially for preparing multi-layer 2D crystal materials. Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each source. Three programmable PID temperature controllers provide excellent control without temperature overshooting.  SPECIFICATIONS:
Furnace Structure
  • Features a unique Triple Channel source feeding system that drives  1 or 3 crucibles with evaporation material through the vacuum or atmosphere controlled tube, suitable for Hybrid Physical CVD-Growth of Multi-layer Film Stacks as programmed.
  • Three independent temperature controllers to control each zone's temperature.
  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • The special refractory coating on liner and heating element helps increase furnace service life.
  • Split cover with Interlock protectioncut the power if the door opens during the furnace heating process.
Power Requirement
  • Single Phase 208~240VAC, 50/60Hz, 10KW (70Amp circuit breaker is required)
Heating Zone Length
  • Three zones: each zone length is 11.8" (300 mm)
Temperature Range 100~1100°C (Continuous); 1200°C (<1 hour) 
Max. Heating Rate ≤ 10°C /min
Temperature Controllers
  • Three digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.  fr operation without attendant(s).
  • +/- 1ºC temperature accuracy.
  • Two K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace can be operated by PC with an MTS02-Y Temperature control software package (include 2 communication chips and one 15" laptop). 
    • Eurotherm 3000 controllers are available with +/- 0.1ºC accuracy at the extra cost.   
Sequential Source Feeding System
  • Three thermocouples are connected to the three small quartz  tubes from the left flange. The stepper motor drives the tube to travel through the large tube together with the thermocouple for real-time temperature monitoring.
  • Three crucibles can be simultaneously placed into the source feed system and delivered 1-3 crucibles into the hot zones for evaporation and deposition under a controlled atmosphere. 
  • Each feeding channel has independent gas inlet and flow-control.
  • The dimension of source crucible: 18mm x 18mm
  •     Pic.1        Pic..2    P
Sample Crucible Movement Control
  • The crucible moving speed and distance are controlled by handwheel.
  • Crucible traveling distance: 300mm.
  • Crucible Dimension: 80mm x 32mm x 13mm  (pic.1)
  • Slidable Crucible Baffle Dimension: 20mm x 20mm  (gif.1)
  • Recommended Sample size: 20mm x 20mm
  •      pic.1           
Temperature Controllers
  • 3 UL listed Eurotherm digital controllers with ±1°C accuracy temperature control of heating rate, cooling rate, and dwell time.
Heating Element Fe-Cr-Al Alloy doped by Mo
Tube Accessories
  • One fused quartz tube (130mm O.D. x 122mm I.D. x 1200mm L) is included.
  • Three fused quartz tubes (25mm O.D. x 21mm I.D. x 1200mm L) is included.
Vacuum Pump
Gas Flow Control System
Dimensions    4000mm(L) x 600mm(W) x 1500mm(H)   
Warranty One-year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
  • CE Certified
  • NRTLor CSA certification is available at extra cost.
Application Notes   
Click here to learn the installation of a gas regulator.
Operation Video
                                     Feature Demonstration                                  Installation Video
How to operate the furnace Controller Operation Video How to create a Temperature gradient  

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