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1200C Tube Furnace w/ Anti-Corrosive Set: PTFE Flanges and Gas Mixer - OTF-1200X-80-F3LV-PTFE

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OTF-1200X-80-F3LV-PTFE is a splittable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3  types of gases for CVD or diffusion.  This furnace system features a PTFE gas system set to provide the anti-corrosive properties beyond stainless steel. The includes an anti-corrosive gauge, a vacuum pump with a cold trap, and the PTFE system. (Gas mixer and flange) 


Furnace Construction
  • Double layer steel casing with air cooling. 
  • Built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.
  • Anti-corrosive gauge to enable vacuum measurements with aggressive gases.
  • Vacuum pump with cold trap prevents aggressive gases reaching the pump.
  • PTFE gas mixer and flange reduce aggressive gas contact to the susceptible surface.

Power Consumption

2.5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz

Maximum Temperature

1200 °C

Continuous workingTemperature

1100 °C

Maximum Heating Rate

<= 20  oC /min

Heating Zone Length

400 mm

Constant Temperature Zone

150mm  (+/-1°C)

Temperature Accuracy

+/- 1°C

Heating Elements Fe-Cr-Al Alloy doped by Mo

Temperature Controllers

  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.

Tube Size and Materials

Quartz tube: OD: 80mm x  ID: 75 mm x Length: 1000 mm

Digital Vacuum Gauge 
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Sealing Flanges
Vacuum Pump
  • 156 L/m Double-Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4  torr. 
  • Stainless steel hose tube is included for connecting to tube furnace.
  • A cold trap is included to capture corrosive material.
Flow Meter & Pressure Meter
New Version front panel


  • Furnace: 550 x 380 x 520 mm
  • Bottom Mobile case: 600 x 600 x 650 mm 

Net Weight

~ 70 kg

Shipping weight

350 lbs

Shipping Dimensions

Two cases in one pallet:  45"x45"x35" /case


One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).


  • CE Certified
  • NRTL or CSA certification is available upon request at the extra cost

Application Notes

Click here to learn the installation of a gas regulator


Operation Instructions


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