1200C Tube Furnace w/ Anti-Corrosive Set: PTFE Flanges and Gas Mixer - OTF-1200X-80-F3LV-PTFE

Name: 1200C Tube Furnace w/ Anti-Corrosive Set: PTFE Flanges and Gas Mixer - OTF-1200X-80-F3LV-PTFE
Brand: Premier Solutions Pte. Ltd

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Description

OTF-1200X-80-F3LV-PTFE is a splittable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system features a PTFE gas system set to provide the anti-corrosive properties beyond stainless steel. The includes an anti-corrosive gauge, a vacuum pump with a cold trap, and the PTFE system. (Gas mixer and flange)

SPECIFICATIONS

Furnace Construction	Double layer steel casing with air cooling. Built-in thermostat automatically runs the cooling system when the case temp. > 55°C. Anti-corrosive gauge to enable vacuum measurements with aggressive gases. Vacuum pump with cold trap prevents aggressive gases reaching the pump. PTFE gas mixer and flange reduce aggressive gas contact to the susceptible surface.
Power Consumption	2.5 KW
Input Voltage	AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	1200 °C
Continuous workingTemperature	1100 °C
Maximum Heating Rate	<= 20 oC /min
Heating Zone Length	400 mm
Constant Temperature Zone	150mm (+/-1°C)
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Temperature Controllers	PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Please click here to learn why SCR is more accurate than SSC (Solid state relay). Built in PID Auto-Tune function with overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port. Advanced Temperature Control (Optional) MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
Tube Size and Materials	Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
Digital Vacuum Gauge	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases. Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Sealing Flanges	A set of PTFE flanges with both vacuum gauge and valve.
Vacuum Pump	156 L/m Double-Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4 torr. Stainless steel hose tube is included for connecting to tube furnace. A cold trap is included to capture corrosive material.
Flow Meter & Pressure Meter	One PTFE three-channel gas mixer is installed inside the mobile case to enable monitoring of gas flow rates.
Dimensions	Furnace: 550 x 380 x 520 mm Bottom Mobile case: 600 x 600 x 650 mm
Net Weight	~ 70 kg
Shipping weight	350 lbs
Shipping Dimensions	Two cases in one pallet: 45"x45"x35" /case
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance	CE Certified NRTL or CSA certification is available upon request at the extra cost
Application Notes Click here to learn the installation of a gas regulator	Please click here to see our typical temperature profile calibration result at various temperatures. In order to obtain an accurate temperature inside the tube furnace, you need to calibrate the temperature by yourself. Please click here to learn how. How to set up a ceramic tube and vacuum flange for the MTI Tube furnace. Warning: Tube furnaces with quartz tube are designed for use with vacuum and low pressure < 0.2 bar Attention: A two-stage pressure regulator must be installed on a gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube Vacuum pressures may only be safely used up to 1000°C
Operation Instructions