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1200C Vertical Vacuum Furnace (8.6"ID, 7.6 Liter) with Automatic Bottom Loading - VBF-1200X-E8

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VBF-1200X-E8 is a vertical vacuum furnace with a quartz chamber of 8.6" ID x 13.4"L- and an automatic bottom loading mechanism designed for easy
sample loading. Water-cooled SS vacuum flanges are lifted via the motor and can achieve vacuum 10^-2 to 10^-5 torr through a mechanical or molecular pump. It is designed for sintering material or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1200°C. A programmable temperature controller, vacuum pump, and recirculating water chiller are included for immediate use.



  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C
  • High purity fibrous alumina insulation for maximum energy saving
  • Water-cooled vacuum flange for longer service life
  • 8.5" ID Quartz chamber for clean treatment
  • Automatic bottom loading for easy operation (max. opening 240mm)
  • The vacuum level can reach 10-5 torr by turbopump


3500 W Max. 


Single-phase 208 - 240 VAC, 50/60Hz (20 A breaker required)

Working Temperature

  • <= 1100°C continuously

  • Temperature Uniformity: +/- 2°C

Temperature Distribution @ 900°C

Heating Elements    

High-quality Ni-Cr-Al resistance wire as heating elements

Quartz Tube Size 


  • Tube size: 9" O.D. x 8.5" I.D. x 13.4" L   ( 230 OD x 218ID x 340 H, mm)

  • Heating area: 8.5" ID x 8.5" Depth (8.6 Liter)

  • The quartz tube is replaceable (click picture on left to order spare tubes)

Vacuum Flange 

  • Stainless steel vacuum flange with dual high-temperature silicone O-rings and a water cooling jacket.
  • DC motor with a remote controller drives the opening and closing operations of the flange
  • One KF25D port on the left side of the furnace for connection to the vacuum pump
  • A Quartz Thermal Block (filled with fibrous alumina) is included to prevent radiation and dissipation of heat. It also provides excellent vacuuming while ensuring a clean environment inside the chamber
  • A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting - one 16L/min recirculating water chiller is included as well
  • One high-quality mechanical vacuum pump, KF25 Vacuum Fitting with KF25 Right-Angle Valve, and a one-meter long KF25 Bellows are included (you may use a molecular pump to achieve 10^-5 Torr vacuum)
  • A digital vacuum meter with a wide range up to 10-4 torr is included for vacuum pressure measurement
Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time
  • Built-in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection
  • Over-temperature protection and alarm allow for operation without attendant(s)
  • +/- 1 ºC temperature accuracy
  • RS485 Communication Port
  • K-type thermal couple
  • The furnace may be operated via PC by installing a control module. Please order an MTS-02 control module  & Laptop at an extra cost
  • Recommend you order a computer (laptop) from us to avoid the software installation problem. For more information please click here
  • Eurotherm temperature controller with +/- 0.1oC accuracy is available upon request at the extra cost

Gas Quenching Option

  • You may use the furnace as gas quenching via ad gas blowing nozzle and sliding door to block radiation 
  • The compressive cold gas device is available at the extra cost to provide - 10oC cold gas for quenching
  • Click the picture left  for detail

Overall Dimensions

700mm(L) x 650mm(W) x 1400mm(H)

Net Weight

160 kg

Shipping Weight

500 lbs

Shipping Volume

48"(L) x 40"(W) x 70"(H) 

  • CE Certified
  • NRTL / CSA Certification is available upon request at the extra cost


  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.)
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty
Application Notes

Click here to learn the installation of a gas regulator
  • Quartz tube furnace is designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  •  Vacuum pressures in the furnace shall be used below 1000°C under vacuum processing
  • The furnace can be used for brazing of two flat samples via top dead weight under vacuum at <1000°C

Operation Demo Video &  Instructions


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