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Enquriy
128L C2C

128L C2C

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Description

Dedicated Film Stress mapping system with high resolution for high throughput process control. Fully automated cassette to cassette, SECS/GEM compliant 300mm Film Stress and Bow Measurement tool. Dual or single FOUP configurations available. Integrated wafer substrate thickness measurement available. 

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Premier Solutions (PS) Pte Ltd Singapore

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