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1479A Metal-Sealed Mass Flow Controller

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Lesker 1479A Metal-Sealed Mass Flow Controller


Metal-sealed mass flow controller, ideal for high-purity semiconductor applications involving corrosive gases, is available with analog and digital communication (ADC) interfaces.

MKS Instruments 1479A mass flow controllers are designed to control gas flows in high-purity applications. They are available with full-scale flow ranges from 10 sccm up to 20 slm of nitrogen.

Both analog and digital (converted from analog signal) versions feature the industry standard 3" footprint and a variety of gas connection fittings. They can often replace existing mass flow controllers or meters in existing gas lines without modification to the line. A unique and patented interchangeable bypass enables the instrument to be retrofitted easily for a different flow range.


  • Metal-sealed, electropolished 316L stainless steel construction
  • 1% F.S. accuracy and 1% of reading for most flow ranges
  • Repeatable flow control to as low as 0.2 sccm
  • MTBF rating for electronics over 100 years ensures reliability



Lesker 1479A Metal-Sealed Mass Flow Controller

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