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1500C Max.Three Zone PECVD System w/ 80 mm Processing Tube - OTF-1500X-III-PEC4SL

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OTF-1500X-III-PEC4SL is three zones 1500ºC PE-CVD tube furnace system consists of 300W RF plasma source, 81Dx 2133mm mullite tube furnace with an integrated channel precision mass flow meter with gas mixing tank, and a high-quality oilless vacuum pump.  Such a PE-CVD furnace is a new tool to grow nanowire or graphene or SiC coating.

(item number has been updated from OTF-1500X-80-III-4CV-PE-SL since March 2019)


Three Zone 1500°C Split Tube furnace
  • Max 1500ºC, and for 1400ºC continuous heating
  • Three programmable precision digital temperature controllers with 30 segments.
  • Three separately controlled Heating Zones: 
    • 200 mm / each  ( included 20 mm spacing )
    • Total zone length:  600 mm  
  • Mullite ceramic tube made in the USA, Size: 81 O.D x 73 I.D x 2133 L mm ( click picture left to order spare )
  • Input power: 208 – 240V AC input, a single phase at max. 6.6KW.
  • Click the Picture below left to see detailed specs.
  • Vacuum sealing flanges are included for immediate use.  One end flange has a quartz window so that plasma glowing can be seen through the window ( click picture below right  to see details )
Plasma RF Power Supply
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      200W max.
  • Matching:                   Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                        <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec.
Oil-less Vacuum Pump Station and Valves
Mass Flowmeters & Gas Mixing Station
  • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. One gas mixing tank is installed on the bottom case with liquid release valve.
    • MFC 1: Gas flow range from 0~100 SCCM
    • MFC 2&3: Control range from 0~200 SCCM  
    • MFC 4: Control range from 0~500 SCCM
  • Gas inlet fitting: four 1/4NPS.
  • Gas outlet fitting: four 1/4NPS.
  • Power: 185-220VAC 50/60Hz
  • 4 stainless steel needle valves are installed on the left side of the bottom case to manually control the mixing of 4 gas types.
  • Four-channel gas flows are integrated into one PLC with touch screen panel to control
  • ( optional: constant pressure control module )
Temperature Control
  • Three precision digital temperature controllers to control three heating zone independently
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
Overall Dimensions
  • Furnace: 865 L x 654 W x 707 H mm 
  • Sliding Rail: dual rail with 1750 mm length
  • Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
  • Net weight: 220 Lbs.
  • Shipping Weight: 1200lbs.
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note:    The software is only compatible with MTI’s Yudian Temperature Controller

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.( please click marks below to learn details )
  • The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 Mpa 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.  
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
  • The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely used up to 1300°
Operation Video
Shipping Weight & Dimensions
  • Total 4 Pallets
  • #1: 1200 lbs, 93"x40"x59"
  • #2: 220 lbs, 48"x40"x45"
  • #3: 285 lbs, 48"x40"x45"
  • #4: 200  lbs, 48"x40"x45"

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