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1500C Six Zone Split Tube Furnace with Flange & Alumina Tube (60 mm O.D.) - OTF-1500X-6Z

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OTF-1500X-6Z- is a six-zone split tube furnace with alumina tube and vacuum-sealed flange working up to 1500°C. Six 30 segments temperature controllers are installed with S type thermal couples and  +/ - 1°C accuracy. It is an excellent furnace for high-temperature CVD and annealing application



Power Input 22 KW
Working Voltage  AC220+/- 10% VAC three-phase 50/60Hz
( 100 A breaker required)
Working Temperature Max.                1500°C 《 30 minutes
Continuous:      800 -1400°C
Recommend Heating rate 5°C/min.
Processing Tube

Material:  Alumina
Size:   60 O.D x 51 I.D x 1800mm L

Heat Zone Length
  • Six heating zones:     12" +8" + 8" + 8" + 8" + 12" 
  • Total heating zone length:  1422 mm  ( ~ 56")
  • Constant Temperature Zone:   800 mm  +/- 5ºC. ( If set 6 zones at the same temperature, without zone spacer. If you don't need the zone spacer, you shall inform us in advance)
  • The Built-in heating zone space to create a thermal gradient up to 100ºC/ cm
Overall Dimensions 1950 mm L × 660 mmW × 762 mmH
Temperature Controllers
  • 6 digital temperature controllers for controlling each heating zone
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 program of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000).
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller

Vacuum Level
  • 10E-2 torr by quality mechanical vacuum pump
  • 10-5 torr by molecular pump
Thermal Block Placement
  • Two thermal blacks are included. Please click the picture below to learn how to place them inside tube
  • You may order flange support to avoid tube rotating ( click Pic below right )
Heating Elements & Thermal couples
  • 48 pcs  1500ºC grade Silicon carbide rod  (14mm Dia. x 150mm heating  x  413mm length)
  • The heating element is consumable, Please click the picture below to order spare and replacement.
  • Six S-type thermocouples (one for each zone).
Net Weight ~ 300 Kg
Application Notes
  • The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 Mpa
  • Never use graphite crucible and the alumina tube.
  • AttentionA two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
  • The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum pressures may only be safely used up to 1300°C for all mullite tube furnaces:
  • Customized long heating zone up to 1200 mm L  with 700 mm uniform temperature zone ( +/- 5°C) , 安定1800mm mullite tube is available upon request; ( click the picture below to see sketch)
Operation Instructions
  • One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty.
  • CE Certified
  • NRTL (UL61010) or CSA certification is available upon request at extra cost.

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