Furnace Structure | - Two heating zones ( 2000L per zone) with independent temperature control up to 1500°C for each zone.
- High-quality SiC heating elements ( 16 pcs )
- 50 mm OD x 60" L mullite tube made in the USA for better thermal shock resistance
- Splittable cover for easy changing the processing tube.
- One pair of sliding rails are installed on the bottom of the furnace to allow moving from one side to the other
- The Temperatur control unit may separate from the furnace to remote control.
- Please click the picture left column for detail specification fo the furnace
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Power | - AC 208-240V Single Phase, 50/60 Hz
- 6KW Max ( 50A Air breaker)
- The power cable is included, but without plug
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Heating Zone & Working Temperature | - Two heating zones: 200 mm/ each (included 20 mm spacing)
- Total zone length: 400 mm
- Max. Working Temperature : 1500°C ( < 30minute )
- Continuous Temperature: 1400°C
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Heating Elements | 1500°C grade SiC Rod ( 16 pcs ) |
Processing Tube Size | - Mullite tube made in the USA
- Size: OD 2" x ID 1.75" x Length: 55" (OD: 50.8 x ID 44.45 x Length 1400 mm)
- Two foam ceramic blocks are included which must be placed inside the tube to avoid heat radiation damaging O-ring.
- Note: The Mullite tube is consumables and has no warranty provided. Faster healing and cooling may reduce the service life of the tube
- Pls click to order spare click here to choose alumina boat
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Temperature Controller | - Two PID automatic controllers via SCR power control for each heating zone
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time with +/- 1ºC accuracy
- Built-in over-temperature alarm and protection allow for operation without an attendant.
- Two S type thermal couples are included.
- RS485 port is built-in and software is included for PC remote control
- Optional:
- Two Eurotherm-3000 precision controllers with +/- 0.1ºC and software is available upon request at $ 2000 extra.
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Vacuum Flanges | - Stainless steel vacuum flanges with the build-in water cooling jacket are installed on both ends of the tube with heavy-duty support.
- The digital vacuum gauge is available upon request ( Pic. below right(
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- Two pairs of fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating
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Vacuum Level | - Limited by the pump. The vacuum pump is not included. Please click the picture below to choose a pump
- 10^-2 torr can be achieved by the mechanical pump
- 10^-5 torr can be reached by turbopump
- For CVD application, must use a cold trap to avoid pump damage
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Options | - The recirculating water chiller is optional for the cooling flange for better vacuum sealed at high temperature
- You may use tap water as a coolant, but we strongly suggest you use a recirculating water chiller for environmental considerations. Please click thumb left to order the water chiller at extra cost.
- For CVD application, you may click the picture below right to order 2-9 channel gas delivery control system
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Sliding Rails / Table | - Double sliding rail made by Cr plated steel
- Sliding length: 1500 mm
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Dimensions | - 650L × 540 W × 755 H ( furnace only)
- 1600L x 380W x 950 mm ( furnace + sliding)
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Net Weight | ~ 200 Kg |
Shipping Weight | 600 lbs |
Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
Compliance | - CE Certified
- NRTL or CSA certification is available upon request at extra cost.
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Application Notes Click here to learn more about the installation of a gas regulator. | - The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 MPa
- Attention: A two-stage pressure regulator must be installed on your input gas tank ( click picture below to review ) and have the output gas pressure set below 3 PSI at all times after opening the gas tank with the gas maintained in a continuous flowing condition. Gas build-up with pressure levels exceeding over 3 PSI may cause irreversible damage to the furnace chamber.
- Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the healing process;
- The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
- Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely used up to 1300°C
- Click here to learn How to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- Proper placement of tube blocks
- Corrosive, flammable, and toxic gases are NOT allowed to be used on this furnace system. Appropriate refractory clothing, face mask, and gloves should be worn at all times when operating the furnace.
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Operation Video | |