Induction Heater
 | - Working Voltage: 220V AC, 50/ 60Hz, Three Phase
- Max.Input Power: 15 KW
- Working Current: 5~52 Amps (a 60A breaker is required)
- Input Power Cable: min. 4AWG cable (the cable is not provided with the machine)
- Output Frequency: 30 - 80 kHz
- Duty Cycle: 100%
- Induction Coil: 150mm(OD) x 140mm(ID) x 65mm(H)
- Air Cooling: rear fan
- Protection: automatic water pressure, over-temperature, and overpower protection
- Refractory assembling: complete refractory assembling made of alumina, including bottom crucible support, crucible holder, and cover
|
Temp. Controller & Thermocouple  | - Precision digital temperature controller with automatic PID tuning.
- 30 segments programmable for controlling heating and cooling rate as well as dwell time.
- Overheating & thermocouple failure protection.
- +/- 3 ºC temperature accuracy.
- Thermocouple: C type ( 1/4"x10" L ) ( please click here to order a spare as consumable)
- Continuous Working Temp. Range: 1000ºC~1900ºC
- Max Working Temperature: 2200ºC (for less than 30 minutes ) and 2000oC for 2 hrs)
- Max. Heating Rate:
- 10ºC/second (1000ºC-1200ºC)
- 8ºC/second (1200ºC~1500ºC)
- 3ºC~6ºC/second (1500ºC~1700ºC)
|
Graphite Crucible & Refractory liners
 | - High Purity Graphite Crucible: 2" OD x 1.57"ID x 4" Depth (4.3'' Height) is included. Max. Loading Capacity: Half of the total volume of the graphite crucible.
- Note: Graphite crucible is consumable, please click picture below-right to order spare
- Optional: Special designed graphite "Box" for accommodating single piece wafer substrate up to 1.5'' O.D x 1/8'' Thick is available upon request. It is an ideal wafer holder which can be inductively heated up and provide uniform heat treatment to the wafer inside.
- The crucible for melt infiltration is available upon request
-
   - Three-layer special design refractory liner can withstand temperatures up to 2200C.
|
| Sealing Flanges & Quartz Chamber | - 130mm(OD) x 122mm(ID) x 360mm(L) Quartz tube is included, click pic.1 to order spare .
- Top Flange: Hinged type flange w/ 1/4'' T/C feedthrough, needle valve, and barbed fitting. (Pic.2)
- Bottom Flange: Stainless steel flange with a needle valve and KF-25 vacuum port. (Pic.3)
- KF25 angle valve & clamps and 1m SS bellows are included for connecting to the vacuum pump.(Pic.4)
|
Pressure Sensor
 | - Anti-corrosive capacitance diaphragm gauge, measurement range up to 3.8x10E-5 torr
- One 24V, 1A DC power adapter is included and ready to use.
|
Flow Meter
 | |
Pressure Relief Valve
 | - This valve is designed to release pressure at 0.02 MPa for safety concerns
|
Water Chiller (Optional)
 | - Temperature range: 5 - 30°C
- Water Flow Rate: 58 L/min
- Water Tank: 15 Liters made of stainless steel
- Note: It is recommended to use a specific coolant to get the best performance. It is normal to wait a couple of minutes for cooling down after several trials of heating
- Note: the input voltage for the water chiller is 220V
|
| Vacuum Pump | - One 156 L/min Double-Stage Rotary Vane Vacuum Pump
- Rate: 156 L/min up to 1E-2 torr vacuum
- Max. Power Consumption: 400W
- For US customers, a 110V Vacuum pump will be included
- If you choose a high-speed turbo-pump, the vacuum level can reach 10e-5 torr
 |
| Heavy Duty Mobile Cart | - Structure: Steel Frame Mobile Cart
- 600mm(L) x 800mm(W) surface for placing Induction Heater & Quartz Tube with Flange
|
| Protective Shield | - For Non-UL Certified version, a protective shield made of phenolic sheets will be provided.
- For UL Certified version, a clear protective shield made of polycarbonate will be provided.
- The protective shield is to be placed around the quartz tube to contain the shooting glass shards if accidents were to happen.
 
|
Product Dimensions
 | Induction Heater: 27.5"(L) x 51.2"(W) x 51.2"(H) (700mm x 1300mm x 1300mm) Water Chiller: 18"(L) x 18.7"(W) x 30"(H) (460mm x 475mm x 762mm) Please refer to the picture to the left for overall size info |
| Warranty | - One year limited warranty with lifetime support
- Consumable parts such as processing tube, thermocouple, refractory liners, o-rings, and heating coil are not covered by the warranty
|
| Compliance | - NRTL certification is available upon request at extra cost, please contact us for a price quote. Certify standards include: 1)
- Induction heater: UL61010-1 & UL499
- Vacuum Pump: UL1450
- Water Chiller: UL61010 & UL1995
|
| Operation Video |   |
Warning
Click here to learn more about the installation of a gas regulator. | - Attention: Protective inert gas must be continuously filled throughout during heating in order to protect the graphite crucible and C thermocouple.
- The C-type thermocouple is consumable which is not covered under our limited warranty.
- The Induction Melting System is designed to operate in low-pressure conditions (< 0.02 Mpa）
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSIG for safe operation. Click here to learn the installation of a gas regulator.
- Never heat the furnace while the gas release valve is closed. The pressure gauge must be used during the healing process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSIG to prevent unforeseeable damages.
|
Application Notes
  | - Please click here to learn how to set up a crucible for melting.
- Melting time and temperature are related to materials, the crucible, refractory insulation, etc. If you do not know whether the induction heater can melt your sample or not, please contact our engineer for consulting.
- PVT (Physical Vapor Transportation) system for growth bulk SiC crystal by changing a suitable crucible, see pic to the left.
|
| Net Weight | |
| Shipping Weight & Dimension | - #1: 410 lbs, 48"x40"x65"
- #2: 355 lbs, 48"x40"x48"
|
