Induction Heater | - Working Voltage: 220V AC, 50/ 60Hz, Three Phases (380VAC, 3phase available upon request)
- Working Current: 5~52 Amps (60A breaker required)
- Max. Input Power: 15 KW
- Output Frequency: 30 - 80 kHz
- Duty Cycle: 80%
- Induction Coil: 220mm(ID) x 65mm(H)
- Air Cooling: Rear Fan
- Protection: Automatic water pressure, over-temperature, and overpower protection
- Refractory Assembling: Complete refractory assembling made of alumina, including bottom crucible support, crucible holder, and cover
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Temp. Controller & Thermocouple | - Precision digital temperature controller with Automatic PID tuning
- 30 segments programmable for controlling heating and cooling rate as well as dwell time
- Overheating & thermocouple failure protection
- +/- 3 ºC temperature accuracy
- +/- 3 ºC temperature accuracy
- Thermocouple: C type (1/4"x16"L ) (pls click here to order spare as consumable)
- Continuous Working Temp. Range: 1000ºC~1900ºC
- Max. Working Temperature: 2000ºC (for less than an hour)
- Max. Heating Rate:
- 4ºC/second (1000ºC-1200ºC)
- 3ºC/second (1200ºC~1500ºC)
- 1ºC~2ºC/second (1500ºC~2000ºC)
- Optional: Eurothermo Controller with +/- 0.1ºC accuracy at an extra cost
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Graphite Crucible & Refractory liners | - High Purity Graphite Crucible: 114 mm O.D x 100 mm ID x 142mm H is included for induction heating. Max. Loading Capacity: Up to 1/2 of the total volume of the graphite crucible.
- Max. melting capability: 4 kg for Iron (tested)
- Three-layer special design refractory liner can withstand temperature up to 2200C
- Note: Graphite crucible is consumable, please click picture below-right to order spare
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Sealing Flanges & Quartz Chamber | - Two-end Open Quartz Tube is included with dimensions of 216 mm(OD) x 208 mm(ID) x 500mm(L), (click picture below-left to order spare or replacement)
- Top Flange: Stainless steel hinged type flange with 1/4'' thermocouple feedthrough, needle valve, and the barb fitting. Please click the picture (bottom right) to view details
- Bottom Flange: Stainless steel flange with a needle valve and KF-25 vacuum port. Please click the picture (bottom-left) to view details
- KF25 right angle valve & clamps and 1 meter SS bellows are included for connecting to a vacuum pump
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Pressure Sensor | - Anti-Corrosive Capacitance Diaphragm Gauge (Gas Independent), measurement range up to 3.8x10E-5 torr
- One 24V,1A DC power adapter is included and ready to use. The input voltage for the adapter is 110~240V Single Phase.
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Flow Meter | |
Water Chiller | - Temperature range: 5 - 30°C
- Water Flow Rate: 58 L/min
- Water Tank: 15 Liters made of stainless steel
- Note: It is recommended to use a specific coolant to get the best performance. It is normal to wait a couple of minutes for cooling down after several trials of heating
- Note: the input voltage for the water chiller is 220V
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Vacuum Pump | - One 156 L/m Rotary Vane Vacuum Pump is included to achieve a 10e-2 torr vacuum.
- If you choose a high-speed turbo-pump, the vacuum level can reach 10- 5 torr
- You may use the Gas purifier to replace turbopump to keep gas purity < 1 ppm O2 and H2O
- (Hi-Speed turbopump) Gas purifier
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Heavy Duty Mobile Cart | - Structure: Steel Frame Mobile Cart
- 600mm(L) x 800mm(W) surface for placing Induction Heater & Quartz Tube with Flange
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Protective Sheild | - For Non-UL Certified version, a protective shield made of polycarbonate will be provided.
- For UL Certified version, a protective shield made of PF will be provided.
- The protective shield is to be placed around the quartz tube to contain any material debris if accidents happen.
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Product Dimensions | Please refer to the picture to the left for overall size info |
Warranty | - One year limited warranty with lifetime support
- Consumable parts such as processing tube, thermocouple, refractory liners, o-rings and heating coil are not covered by the warranty
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Compliance | - NRTL Certification is available upon request at extra cost
- In order to pass NRTL, the system must be upgraded as the picture left
- An isolated transformer will also be needed
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Operation Manual & Video | |
Application Notes Click here to learn more about the installation of a gas regulator. | - Attention: Protective inert gas must be continuously filled throughout the experiment in order to protect the graphite crucible and C thermocouple. The gas flow rate should be limited to <200 SCCM。 Never heat the furnace while the gas release valve is closed
- The C-type thermocouple is consumable which is not covered by manufacturer's warranty.
- Please click here to learn how to setup crucible for melting
- The Induction Melting System is designed for use under vacuum and low pressure < 0.02 Mpa
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- PVT ( Physical Vapor Transportation ) system for growth bulk SiC crystal by changing a suitable crucible, please Pic below or ask our engineers how to
- This furnace can be modified as RTP and HPCVD system with the gas delivery system. Please click the Pictures below to see how. If you have any special requirement, please let us know
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Net Weight | 350 lbs |
Shipping Weight | TBD |
Shipping Dimensions | TBD |