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1600C Vertical Atmosphere Controlled Furnace (11" I.D., 13 Liter) with Automatic Bottom Loading - VBF-1600X-B

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VBF-1600X-B is a vertical atmosphere controlled furnace with an 11" I.D. x 13"L  sealed chamber and automatic bottom loading mechanism.  Water-cooled SS vacuum flanges are lifted via the motor and can achieve vacuum 10-2 torr through a mechanical pump. It is designed for sintering material or annealing semiconductor wafers under vacuum or various other gas atmospheres with a temperature up to 1600°C. A programmable temperature controller, vacuum pump, and recirculating water chiller are included for immediate use.



  • Double-layer steel casing with water cold vacuum-sealed  chamber
  • High purity fibrous alumina insulation for maximum energy saving
  • Automatic bottom loading for easy operation
  • The automatic pressure control and protection is built-in for safe operation
  • Programmable temperature control up to 1600ºC


  • Single-phase 220 VAC, 50/60Hz (20 A breaker required)
  • 13 KW Max. 

Working Temperature

  • 800°C - 1600°C continuously
  • Temperature Uniformity: +/- 0.5°C
  • Recommended heating rate: ≤10°C/min

Heating Elements    

  • MoSi2

Vacuum Chamber

  • Effective heating chamber size: 280 mm diameter x 300 mm H
  • Vacuum sealed stainless steel chamber with fibrous alumina thermal insulation layer inside
  • A water cooling jacket on the outside of the chamber and flange to protect the vacuum sealing O-rings 
  • One 16L/min recirculating water chiller is included  ( Pic. 1)
  • Vacuum ChamberBottom loaded flange driven by the electric motor for easy sample load of 50 Kg max.
  • One high-quality mechanical vacuum pump is included to achieve a 10-2 torr level. (Pic. 2)
  •   Pic. 1Pic. 2
Control Panel
  • Touch screen control panel for controlling temperature and inert gas pressure.
  • Temperature control
    • Eurotherm Temperature Controller inside
    • 1 program, 24 segments programmed with ramping, cooling, and dwelling steps
    • Built-in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection
    • +/- 0.1 ºC temperature accuracy
    • B-type thermal couple
  • Pressure control
    • Furnace purging function by manual or auto mode
    • Constant pressure control can be achieved between 100 - 115 KPa
    • Safety pressure release valve built-in
    • Two gas flowmeters are installed in the front panel. 
  • PC control
    • RS485 port is built-in for PC operation
    • Please order the laptop along with the furnace from us, we will install the software and test it before shipping. 

Overall Dimensions

1500mm (L) x 1050mm (W) x 2040mm (H)

Net Weight

500 kg


  • One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.)
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty


  • CE Certified
  • NRTL / CSA Certification is available upon request at an extra cost

Operation Demo Video &  Instructions


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