| Tube Furnace | Structure | - Double layer steel casing with air cooling. Two cooling fans inside to keep the temperature of the outside case < 55°C.
- High purity fibrous alumina insulation for Maximum energy saving.
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| Power Consumption | 5kW Max. |
| Input Voltage | AC 208~240V, Single Phase, 50/60Hz |
| Max. Heating Temp. | 1700°C |
| Max. Heating Rate | 5°C/min |
| Max. Cooling Rate | 5°C/min |
| Heating Zone Length | 455mm (18") |
| Constant Temp. Zone | 150(+/-1C) |
| Temperature Accuracy | +/-1°C |
| Temperature Controller | - PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Please click here to learn why SCR is more accurate than SSC (Solid state relay).
- Built in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- Advanced Temperature Control (Optional)
- MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
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| Heating Elements | 1800 grade MoSi2 ( 8 pcs ) |
| Tube Materials and Size | - 99.8% high purity Al2O3 ceramic tube
- ID: 73mm x OD: 80 mm x 1000 mm length.
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Digital Vacuum Gauge | |
| Vacuum Sealing | - Two stainless steel flanges with a digital vacuum gauge and valves are included.
- Vacuum pressure can reach 5x10-2 torr via the mechanical pump.
- The leaking rate is 6 mtorr/min in max. and 2 mtorr/min when stable, click the picture. below to get details chart and data measured by CE certificated digital vacuum meter:
(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X-axis is passed over in the chart, therefore, steep variety in there) |
| Vacuum Pump and fittings | Vacuum Pump
 | Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs.
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| Fittings | The standard vacuum fittings include:
- A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4" Swagelok tube connector.
- A 1000mm long KF-25 stainless steel vacuum bellows
- Four KF-25 quick clamps
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| Gas Flow Meter | - Three gas flowmeters ( 4% accuracy FS) are installed inside mobile case provide a monitor to gas flowing rates.
- 1) Compact direct read flow meter, 10-100 cc/min.
- 2) Compact direct read flow meter, 16-160 cc/min.
- 3) Compact direct read flow meter, 25-250 cc/min.
- One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
- Four stainless steel needle valve are installed in the front panel to control the gas route independently.
 |  |  | | Front Panel | Back Panel | Gas Routes | |
| Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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| Shipping Info | Product Dimensions | - 80 mm O.D Tube Furnace: 550 x 500 x 700mm L x W x H
- Gas Mix Station: 600 x 600 x 700mm
- Vacuum station: 600 x 600 x 700mm
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| New weight | 450 lb (in total) |
| Shipping weight and Dimensions | Three pallets: 220 lbs with 48x40x42", 200 lbs eith 39x31x40: and 180lbs with 39x31x40" dimension. |
| Warranty | One year limited warranty (Consumable parts such as processing tubes, O-rings, and heating elements
are not covered by the warranty, please order the replacement at related products below.) |
| Laptop, software & WiFi Control (Optional) | |
| Compliance | - CE Certified
- UL / MET / CSA Certification is available upon request, additional charges will apply
- Temperature controller is MET and CE Certified
- Transformer is UL Certified
   
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Application Notes
Click here to learn more about the installation of a gas regulator. | |
| Operation Instructions |   |
