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1700C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge - GSL-1700X-F3LV

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Description

GSL-1700X-F3LV tube furnace is a CE certified  alumina tube furnace with mechanical vacuum pump and three channels gas flowing system, which can heat the samples to 1700°C and achieve vacuum degree up to 5x10-2 torr and mix 1- 3  type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gasses.

SPECIFICATIONS

Tube Furnace Structure
  • Double layer steel casing with air cooling. Two cooling fans inside to keep the temperature of the outside case < 55°C.
  • High purity fibrous alumina insulation for Maximum energy saving.
Power Consumption 5kW Max.
Input Voltage AC 208~240V, Single Phase, 50/60Hz
Max. Heating Temp. 1700°C
Max. Heating Rate 5°C/min
Max. Cooling Rate 5°C/min
Heating Zone Length 455mm (18")
Constant Temp. Zone 150(+/-1C)
Temperature Accuracy +/-1°C
Temperature Controller
  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Advanced Temperature Control (Optional)
  •             
Heating Elements 1800 grade MoSi2   ( 8 pcs )
Tube Materials and Size
  • 99.8% high purity Al2O3 ceramic tube
  • ID: 73mm x  OD: 80 mm   x 1000 mm length.    
Digital Vacuum Gauge 
Vacuum Sealing
  • Two stainless steel flanges with a digital vacuum gauge and valves are included.
  • Vacuum pressure can reach 5x10-2 torr via the mechanical pump.
  • The leaking rate is 6 mtorr/min in max. and 2 mtorr/min when stable, click the picture. below to get details chart and data measured by CE certificated digital vacuum meter:  

(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X-axis is passed over in the chart, therefore, steep variety in there)
Vacuum Pump and fittings Vacuum Pump
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs.
Fittings The standard vacuum fittings include:
  • A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4" Swagelok tube connector.
  • A 1000mm long KF-25 stainless steel vacuum bellows
  • Four KF-25 quick clamps
Gas Flow Meter
  • Three gas flowmeters ( 4% accuracy FS) are installed inside mobile case provide  a monitor to gas flowing rates.
    • 1) Compact direct read flow meter, 10-100 cc/min.
    • 2) Compact direct read flow meter, 16-160 cc/min.
    • 3) Compact direct read flow meter, 25-250 cc/min. 
  • One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
  • Four stainless steel needle valve are installed in the front panel to control the gas route independently.
Front Panel Back Panel Gas Routes
Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
Shipping Info Product Dimensions
  • 80 mm O.D Tube Furnace:    550 x 500 x 700mm L x W x H 
  • Gas Mix Station: 600 x 600 x 700mm
  • Vacuum station: 600 x 600 x 700mm
New weight 450 lb (in total)
Shipping weight and Dimensions Three pallets: 220 lbs with 48x40x42", 200 lbs eith 39x31x40: and 180lbs with 39x31x40" dimension.
Warranty One year limited warranty (Consumable parts such as processing tubes, O-rings, and heating elements
are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller     

Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
  • Transformer is UL Certified
                       
Application Notes

Click here to learn more about the installation of a gas regulator.
Operation Instructions         

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