Furnace Structure | Double layer steel casing with air cooling. Two cooling fans inside to keep the temperature of outside case < 55oC. High purity fibrous alumina insulation for Max, energy saving. Three independent heating zone via three precision temperature controllers. Click picture on left to review detail specification |
Thermal Block Placement | |
Power Consumption | 10 KW |
Input Voltage | AC 208-240V Single Phase, 50/60 Hz (75A air breaker required) |
Heating Zone | Three zones: total 25" (630 mm) heating zone (included two refractory separators) - Zone 1: 7.5" (190 mm) heated by 4 pcs U type SiC
- Working temperature 800 - 1400°C
- Heating rate: 10°C/min
- Zone 2: 10" (250 mm) heated by 6 pcs U type MoSi2
- Working temperature 800 - 1700°C
- Max. Heating rate: 5°C/min
- Zone 3: 7.5" (190 mm) heated by 4 pcs U type SiC
- Working temperature 800 - 1400°C
- Max. Heating rate: 10° C/min
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| - 99.8% purity Alumina Tube
- 2-3/8" ( 60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length
- 60 mm stainless steel vacuum sealing flange with valve and meter is included
- Two porous ceramic blocks are included for protecting flange from heating radiation
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Temperature Controller | - Three precision temperature controllers to control three zones separately.
- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- Optional:
- The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost.
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
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European Temperature Controllers (optional upgrade)  | - 1 heating channel
- 1 programs of 8 or 24 segment
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
- Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Vacuum Gauge | |
Vacuum Pump | Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
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Three Channel Gas Mixing and Delivery System  | Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case which are able to monitor gases flowing rate (three different kinds of gases in total) click picture on left to see detail specs 1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3) Compact direct read flow meter, 25-250 cc/min.
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Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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Power Cable & Plug  | - 10 feet length 8-3 AWG heavy duty UL approved power cable is included
Extra length cable can be ordered by clicking picture on left Plug is not included,you can order from your local hardware store according to female plug in your lab |
Dimensions | |
Net Weight | 150Kg (furnace) + 100Kg ( total 550lb) |
Shipping Weight | 800 lbs |
Shipping Dimensions | Two cases in one pallet: 45x45x35/case |
Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control (Optional) | |
Compliance | - CE Certified
- UL / MET / CSA Certification is available upon request, additional charges will apply
- Temperature controller is MET and CE Certified
- Transformer is UL Certified
   
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Application Notes | |
| - The tube furnaces with alumina tube are designed for using under vacuum and low pressure < 0.02 Mpa / 0.2 Bar/ 3 PSI
- Never use graphite crucible in alumina tube.
- Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
- Vacuum limit definition for all alumina tube furnaces: * Vacuum pressures may only be safely used up to 1500°C
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Operation Instructions | |
