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  7. 1700C Tube Furnace with High Vacuum System (10^-4Torr) & (2-4 Ch optional) MFC Gas Mixer - GSL-1700X-4-HVC-LD

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Tube Furnace with High Vacuum & Gas Delivery System by Precision MFC | CVD Furnace System | Tube Furnace with MFC

1700C Tube Furnace with High Vacuum System (10^-4Torr) & (2-4 Ch optional) MFC Gas Mixer - GSL-1700X-4-HVC-LD

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Description

GSL-1700X-4-HVC-UL is CE certified and TUV(UL61010) or CSA  Ready 60mm diameter single zone alumina tube furnace with high vacuum pump system (up to 10-5 torr) and 2 channel precision digital Mass flow-controllers, which can control two types of gases for CVD or diffusion and work up to 1600ºC.

Specifications

GSL-1700X series tube furnace Casing Double layer steel casing with air cooling.
Two cooling fans inside to keep case temperature < 55°C.
High purity Alumina refractory chamber
Vacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels.
Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
Processing Tube Material: High Purity Alumina
One 60mm O.D. processing alumina tube (EQ-TA-60D-M1000) is included with the furnace.
The furnace can be also custom made to fit the 50mm or 80mm O.D. processing alumina tube at an extra cost, please contact us for more information. 

Thermal Block Placement
Power 6KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element 8 pcs 1800°C grade MoSi2 heating element
Working Temp. Max. Heating Temp.: 1650°C
Continuous Working Temp.: 1600°C
Heat-up Rate  <=5°C/min
Heating Zone Length Heating zone length: 457 mm (18")
Constant Temperature Zone length: 150 mm (6")(+/-1°C)
Temp. Control PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments.
Temperature accuracy:±1°C
Thermocouple: B type built inside the furnace
RS485 Communications Port.
  • Advanced Temperature Control (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
  • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
            
Vacuum Seal One pair of stainless steel vacuum flange with:
- one mechanical vacuum gauge
- two needle valves
- one KF-25 connector  and KF-25 to KF-40 adapter for the high vacuum station.
- one 1/4" Swagelok tube connector
Dimension 550 x 380 x 520
High Vacuum Station Power 100~110W
Rated Voltage AC 208-240V Single Phase, 50/60Hz
Dimension 600(L) x 600(W) x 700(H), mm
Structure Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included
Control Panel One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
Self testing Spinning up Error report Volt meter  Full speed
Volume Flow Rate Nitrogen   N2     33 L/s
Helium      He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Mass Flow Gas Control
EQ-GSL-LCD
 Structure
Made of 316 stainless steel valve
Gas mixing tank: Φ80X120mm 
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.
The flow rate control range and number of gas routes are available for customization. Please contact us for detail information.
Power 23W per channel
Rated Voltage  AC 220V/50Hz Single phase
Gas routes Please select the number of gas routes in the optional bar to update the price
Application Notes
Warranty One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks below to learn details)
                    
Shipping Dimensions Two cases in one plastic pallet: 45x45x35/case
Warnings

Click here to learn more about the installation of a gas regulator.
  • The tube furnaces with alumina tube are designed for using under vacuum and low pressure < 0.02 MPa / 0.2 Bar/ 3 PSI 
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
  • The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum limit definition for all alumina tube furnaces: * Vacuum pressures may only be safely used up to 1500°C
Operation Instructions

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