2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - EQ-ALD-GSL-4

Working Voltage

Power

PLC Touch Screen  

• All parameters of ALD vapor pulse time and  Gas flow are controlled by PLC via a 6" touchscreen panel in a mobile cart 
  • Control Two ALD valves with pulse duration time and cycling with microsecond precision
  • Control For channels gas delivery with ±0.2%F.S via MFC
  • Display vacuum pressure 
  • Other parameters upon request of the customer
  • Please click picture left to see control interface
•  RS485 Port and a supplied software are included for remote operation by PC.

 ALD Valves

• Two ALD valves are required to deliver two type of  vaper precursors ( not included )
• You may use your own ALD valve or click the picture below to order from us
• 

•  Four MFC is included to deliver 4 types of carrying gases independently or mixing 
  • Controlling Range:
  • Controller 1: 0~100 SCCM
  • Controller 2: 1~199 SCCM
  • Controller 3: 1~199 SCCM
  • Controller 4: 1~499 SCCM
  • Note: Other range MFC can be customized at extra cost upon request. ]
• Working Temperature: 5~45 ºC
• Max. Pressure: 3x106 Pa
• Accuracy: ±1.5% FS
• Liner: ±（0.5-1.5）%F.S.
• Duplicate accuracy: ±0.2%F.S.

• One stainless steel gas mixing tank is built in
• Internal pipeline: 1/4" O.D stainless steel
• External pipeline: 1/4" O.D PTFE

• 4 needle valves made of  316 Stainless Steel are included
• Φ1/4” Swagelok Tube Fitting

• All components are CE certified 
• The unit can pass TUV(UL61010) or CSA certification at extra cost. （ please click marks below to learn details )

       

• You may consider ordering bubbler or vapor delivery system by click picture below
• We can help you to connect the ALD control unit with MTI tube furnace at extra cost