2179A Mass Flow Controllers

Lesker 2179A Mass Flow Controllers

An integral shut-off valve is available with analog and digital communication (ADC) interfaces.

MKS Instruments 2179A mass flow controllers are designed to control gas flows in a wide variety of applications and available with full-scale flow ranges from 10 sccm up to 20 slm of nitrogen.

The normally closed, pneumatic shut-off valve provides positive shut-off to 10^-9 scc/sec. He. Both analog and digital (converted from analog signal) versions feature the industry-standard 3" footprint and various gas connection fittings. It can replace existing mass flow controllers or meters in existing gas lines without modification to the line. A unique and patented interchangeable bypass enables the instrument to be retrofitted easily for a different flow range.

Features

• Elastomer-sealed, 316L stainless steel construction
• 1% F.S. accuracy and 1% of reading for most flow ranges
• Integral pneumatic diaphragm shut-off valve (70–100 psi needed to actuate)
• Repeatable flow control to as low as 0.2 sccm
• MTBF rating for electronics over 100 years ensures reliability

Lesker 2179A Mass Flow Controllers