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24"L 3 Zones Split Tube Furnace with Hinged Flange & Quartz Tube (80 -130 mm, 1200C Max) - OTF-1200X-III-SHG

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OTF-1200X-III-S is CE certified and UL Standard 24" Long ( 6"+12"+6")  split-able three-zone tube furnace with quartz tube (size selectable) and hinged type flange. Such configuration allows easy sample loading/ unloading. Three 30 segments temperature controllers are installed with K-type thermal couples. Microprocessor-based self-tuning PID provides excellent control with no overshooting and  +/- 1 °C accuracy. It is an excellent furnace for sample annealing, diffusion and sintering in the various gas atmosphere up to 1200°C.    (Please select the tube size in the options bar to view the price and model)


Furnace structure
  • Double layer steel case with two cooling fans which ensure low surface temperature;
  • Energy saving high purity fibrous alumina insulation; 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside of the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
  • Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum.
  • Furnace can be separated from temperature controller and place it on remote location

                click here to choose a crucible

Rated voltage AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug)
Power consumption 6  KW Max.
Heating elements Fe-Cr-Al Alloy doped by Mo
Heating zone length
  • Three zones: 610mm (24") in total
  • Z1-Z2- Z3:152.4mm (6") + 304.8mm (12") + 152.4mm (6")
  • +/-1ºC Constant Temperature Zone: 260 mm length
  • +/-2ºC Constant Temperature Zone: 480 mm length (click the pic below for detail)
Fused Quartz Tube(Please choose from product option) Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1200 L  (mm)
2" wafer Max.
Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L   (mm)
3" wafer Max.
Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L  (mm)
4" wafer Max.
Warning: The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 Mpa (absolute pressure)
Heating temperature
  • Max. Heating Temperature: 1200°C at flowing gas 
  • Continuous Heating Temperature: 1100°C  at flowing gas 
  • Max. Heating temperature at Vaccum 1000°C 
  • Max. Heating Rate: 20°C/min
Temperature Controllers
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Vacuum Flange and Gauge
  •  Hinged type flanges are installed on both ends for easy sample loading/unloading;
  • KF25D adapter installed on left flange with a precision digital vacuum gauge;
  • SS needle valve with 1/4" pipe connector installed on right flange;
  • Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by molecular pump;
  • Optional: you may choose our molecular vacuum pump station for higher vacuum


Optional Part In order to build a complete CVD system, you may need bubbler or gas delivery system, and quartz wafer Carrier. . Please click picture below to choose:
Dimensions 750mm(L) x 525mm(W) x 670mm(H)  
Net Weight 70 kg
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller     

  • CE/UL/CSA Certificate
  • Please select the certificate in option bar:
    • CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
    • UL certificate -  UL approval (UL 61010)
Shipping dimensions 65"(L) x 45"(W) x 35"(H)
Shipping weight 340lbs
Application Notes
Operation Instructions

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