Input Power
 | - Single-phase 220VAC +/- 10%, 50 / 60 Hz
- 2000 W (including a vacuum pump and water chiller)
- If the voltage is 110 V, a 3000 W transformer can be ordered at MTI (Click the picture to the left for detail)
|
Source Power
| - Three sputtering power sources are integrated into one control box (Click picture below to see detailed specs)
- DC source: 500 W power for coating metallic materials (Pic 1)
- RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)
 -- Pic 1  -- Pic 2 |
Magnetron Sputtering Head | - Three 1" magnetron sputtering heads with water cooling jackets (Click Pic #1 for detail information) are included and inserted into the quartz chamber via quick clamps
- RF cable replacement can be purchased at MTI (Click Pic #2 for detailed information)
- One manually operated shutter is built on the flange (See Pic #3)
- 16 L/min recirculating water chiller is included for cooling sputtering heads (Click Pic #4 for detail )
 Pic. 1  Pic. 2  Pic. 3  Pic. 4
|
Sputtering Target | - Target size requirement: 1" diameter x 1/8" thickness max
- Sputtering distance range: 50 – 80 mm adjustable
- Sputtering angle range: 0 – 25° adjustable
- 1" diameter Cu target and Al2O3 target are included for demo testing
- Various oxide 1” sputtering targets are available upon request at extra cost
- For target bonding, 1 mm and 2 mm copper backing plates are included. Silver epoxy (Pic #1) and extra copper backing plates (Pic #2) can be ordered at MTI
 Pic 1  Pic. 2 |
Vacuum Chamber | - Vacuum chamber: 256 mm OD x 238 mm ID x 276 mm Height, made of high purity quartz
- Sealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring
- Stainless steel shield cage is included for 100% shielding of RF radiation from the chamber
- Max vacuum level: 1.0E-5 Torr with turbopump and chamber baking
|
Vibration Sample Holder
  | - The amplification of vibration is adjustable from 400 - 2000 RPM in terms of motor speed
- One 2" powder reservoir (cup shape) is on the vibration motor. Powder bounce and self rotate during the coating process.
- Suggested powder quantity: 5 - 20 ml
- Suggested particle size: 1 ~ 1000 microns ( Powder must be vacuum dry before coting)
- The sample stage of blade mixing is available upon request for the larger amount of powder
|
Gas Purification System
 | - MTI innovative technology-- using a gas purification system to replace turbopump to get battery coating.
- Two-columns of Molecular sieves are Built-in in the system. which can remove oxygen and humidity less than < 1 PPM
- Regeneration Temperature Controlleris built-in for automatically regenerating the filters
- Automatically purging function is built-in for quick reducing O2 < 200ppm & H2O < 50 ppm before recycling.
- The automatic pressure control system is built in to keep the pressure at a constant level
- 6" color PLC touch panel is included which can set and display the humidity and pressure level.
- Click the picture left column to see detailed specifications
- After purification with O2 & H2O < 1 PPM, the chamber pressure can be set up a suitable vacuum level ( 50 - 100 m-torr) for sputtering, which is much better than 10-5 torr vacuum.
|
Optional
 | - Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å
|
Overall Dimensions | 540 mm L x 540 mm W x 1000 mm H |
Net Weight of Coater | |
Shipping Weight & Dimensions | - Total 3 Pallets
- 365 lbs, 48" x 40" x 45"
- 390 lbs, 48"x 40" x 49"
- 210 lbs, 48" x 40"x 30"
|
Compliance
 | - CE approval
- NRTLcertification is available upon request at extra cost, please contact our sales representative for the quote.
|
Warranty | - One year's limited warranty with lifetime support
|
Operation Demo Video |  |
Optional | - This coater may be placed into a standard glovebox with modification for air-sensitive materials. (Pic. 1)
- larger 3 head coater with 12" Vac. chamber, 8" dia. sample order, and 3x 2" sputtering guns, is available upon request (Pic. 2)
 Pic. 1  Pic. 2 |
Pic. 2
