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3 Zone Furnace (5" Dia, 1200C Max) w/ Sliding Flange, Gas Mixer & Vacuum Pump -OTF-1200X-III-5-C3LVSF

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OTF1200X-III-5-C3LVSF (updated from OTF-1200X-5-III-SF) is a UL ready splittable 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a thermal gradient by adjusting the temperature of three zones. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gasses.

Furnace structure

  • Double-layer steel case with two cooling fans to ensures low surface temperature
  • Energy-saving high purity fibrous alumina insulation
  • One flange is supported by a sliding rail to make sample loading /unloading easy; another seal flange is installed with a digital vacuum gauge

Power Consumption

7 KW Max (power cord is included without plug)

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz (Please select the right pump in the options bar based on your working requirement) (40A breaker required)

Maximum Temperature


Continuous Temperature


Max. Heating Rate

 ≤ 20°C /min

Heating Zone Length

  • Three zones: (900mm, 36" in total)
    • Zone 1: 229mm  (9")
    • Zone 2: 457mm  (18.0")
    • Zone 3: 229 mm (9")

Constant Temperature Zone

  • If three zones are set at the same temperature, the constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1°C
  • If using only one zone (center zone), the constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C

Temperature Accuracy

 +/- 1oC

Heating Elements

 Fe-Cr-Al Alloy doped by Mo

Temperature Controllers

  • Three precision temperature controllers to control three zones separately
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time
  • Built-in overheating & broken thermocouple protection
  • Over-temperature protection and alarm allows for operation without attendant(s)
  • +/- 1 ºC temperature accuracy
  • RS485 Communications Port
  • Optional:  
    • The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at an extra cost
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here


European Temperature Controllers (optional upgrade)

  • 1 heating channel
  • 1 program of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set

Vacuum Sensor & Display
Vacuum pressure gauges

  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gasses
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)

Oxygen Monitoring (not included)

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:

Vacuum Pump

  • 156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10-2torr. Stainless steel hose tube is included for connecting to tube furnace
  • SS vacuum pipe & ball valve with KF25 adaptor guarantee a ^-2 torr vacuum
  • Optional: You may achieve 1.0E-5 Torr vacuum by turbo pump ( click pic.1 to order)
  • Optional: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV (Pic.2). This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr
                               Pic.1                    Pic. 2

Tube Size and Flange

  • 130 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included
  • Vacuum flanges with both valves and pressure gauge are included
  •  Click to order spare            click here to choose a crucible

Sliding Rail

800mm long sliding rail is installed with one end flange to make loading & unload sample easy
  • 2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal (see bottom left picture)
  • 5" Quartz tube can accommodate 4" quartz wafer boat without  holder (see bottom right picture)

Mobile Cart & Flow Meters


1080 X 430 x 600mm

Net Weight

~70 kg

Shipping Dimensions

65x45x35" (x2 pallets)

Shipping Weight

540 lbs


One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below)

Laptop, software & WiFi Control (Optional)

  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces
  • A wireless remote control provides up to 300 meters operating range
  • The above features are available upon request at an extra cost (up to $1,000). 


  • UL ready
  • CE / MET / CSA Certification is available upon request, additional charges will apply


Application Notes

Click here to learn the installation of a gas regulator

Operation Instructions


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