Furnace structure | - Double-layer steel case with two cooling fans to ensures low surface temperature
- Energy-saving high purity fibrous alumina insulation
- One flange is supported by a sliding rail to make sample loading /unloading easy; another seal flange is installed with a digital vacuum gauge
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Power Consumption | 7 KW Max (power cord is included without plug) |
Input Voltage | AC 208-240V Single Phase, 50 or 60 Hz (Please select the right pump in the options bar based on your working requirement) (40A breaker required) |
Maximum Temperature | 1200°C |
Continuous Temperature | 1100°C |
Max. Heating Rate | ≤ 20°C /min |
Heating Zone Length | - Three zones: (900mm, 36" in total)
- Zone 1: 229mm (9")
- Zone 2: 457mm (18.0")
- Zone 3: 229 mm (9")
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Constant Temperature Zone | - If three zones are set at the same temperature, the constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1°C
- If using only one zone (center zone), the constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C
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Temperature Accuracy | +/- 1oC |
Heating Elements | Fe-Cr-Al Alloy doped by Mo |
Temperature Controllers | - Three precision temperature controllers to control three zones separately
- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time
- Built-in overheating & broken thermocouple protection
- Over-temperature protection and alarm allows for operation without attendant(s)
- +/- 1 ºC temperature accuracy
- RS485 Communications Port
- Optional:
- The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at an extra cost
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here
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European Temperature Controllers (optional upgrade)
 | - 1 heating channel
- 1 program of 8 or 24 segment
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
- Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set
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Vacuum Sensor & Display
 | - Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gasses
- Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
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Oxygen Monitoring (not included) | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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Vacuum Pump
 | - 156 L/m Double Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10-2torr. Stainless steel hose tube is included for connecting to tube furnace
- SS vacuum pipe & ball valve with KF25 adaptor guarantee a ^-2 torr vacuum
- Optional: You may achieve 1.0E-5 Torr vacuum by turbo pump ( click pic.1 to order)
- Optional: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV (Pic.2). This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr
 
Pic.1 Pic. 2 |
Tube Size and Flange | - 130 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included
- Vacuum flanges with both valves and pressure gauge are included
 Click to order spare  click here to choose a crucible |
Sliding Rail | 800mm long sliding rail is installed with one end flange to make loading & unload sample easy - 2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal (see bottom left picture)
- 5" Quartz tube can accommodate 4" quartz wafer boat without holder (see bottom right picture)
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Mobile Cart & Flow Meters
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Dimensions | 1080 X 430 x 600mm |
Net Weight | ~70 kg |
Shipping Dimensions | 65x45x35" (x2 pallets) |
Shipping Weight | 540 lbs |
Warranty | One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below) |
Laptop, software & WiFi Control (Optional) | - Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use
- Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces
- A wireless remote control provides up to 300 meters operating range
- The above features are available upon request at an extra cost (up to $1,000).
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Compliance | - UL ready
- CE / MET / CSA Certification is available upon request, additional charges will apply
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Application Notes
Click here to learn the installation of a gas regulator | |
Operation Instructions | 
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