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5" PECVD Split Tube Furnace (1200C Max.) with Vacuum Pump Station - OTF-1200X-5L-PE

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OTF-1200X-5L-PE is a PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 130ODx122ID, mm quartz tube furnace, and high-quality vacuum pump with a cold trap. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) up to 4" wafer.
(item number has been updated from OTF-1200X-5L-I-PE since March 2019)


Single Zone 1200°C Split Tube furnace

  • Max 1200ºC, and for 1100ºC continuous heating
  • Programmable precision digital temperature controllers with 30 segments.
  • Heating Zones: 880 mm • Quartz Tube Size: 130 ODx122 IDx2000L mm
  • Input power: 208 – 240V AC input, single phase at max. 7KW.
  • Vacuum sealed flanges are included for immediate use. 
  • Optional:  three-zone furnace with 24" heating zone can be replaced at extra cost ( click Pic 2 to review specs )
Plasma RF Power Supply
  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power:                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange
Pressing Tube 
  • Quartz Tube: 130 ODx122 IDx2000L mm (5"x 79"). included.  Click Pic 1 to order spare
  • 5" SS vacuum flange with valve and K25Vacuum port is included
  • One Anti-corrosive Pressure Gauge is installed on the flange
    • 3.8x10-5 to 1125 Torr measurement range
    • Anti-corrosive, gas-type independent 
    • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
    • Fast atmospheric detection eliminates waiting time and shortens process cycle
    • We provide extra 24V 7Ah batteries pack as a power supply for pressure gauge which is sufficient for 30-40 hrs battery life per charge.
  Vacuum Pump and valve
  • EQ-FYP-Pump is installed inside the heavy-duty mobile cart.
  • One  Cold Trap for Recovering Condensables is included
  • KF25 adapter and stainless steel pipe are connected between the pump and tube flange with precision ball valve for user's plug and immediately use.
  • 10E-2 Torr vacuum can be achieved inside the processing tube
Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature  protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
  • Furnace: 1100 X 450 x 670 mm
  • Net weight: 220 lbs
  • Shipping weight: 350 lbs
One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables a user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller     

  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing system, vacuum system, and plasma generator
  • The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.( please click marks below to learn details )
Operation Instruction


Click here to learn the installation of a gas regulator
  • An operator should Keep safe distance >1 meter away from the Plasma Generator & its furnace chamber when the plasma is activated. The operator shall wear RF protective garments when continues operation at a close distance (< 1 meter) with the plasma is required. 
  • It is highly recommended to shield the furnace in an RF protective fume hood. We recommend you prepare an RF Detector to monitor RF power all the time.
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • MTI reserves right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above
Shipping Dimensions
  • Pallet #1: 48" x 40" x 60", Pallet #2: 48" x 40" x 40", Pallet #3: 48" x 40" x 40",  Pallet #4: 48" x 40" x 40"
Total Shipping Weight 500 kg (1100 lbs)

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