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5" Rotary Tube Furnace w/ 3 Zones and Gas Delivery System at 1200C Max.- OTF-1200X-III-R5L-LVC4

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OTF-1200X-III-R5L-LVC4 is a 5" rotary CVD tube furnace with 3 heating zones and 4 Channel precision gas delivery system. The furnace is designed for coating battery powder both anode and cathode for the next-generation battery
and is a cost-effective intermediate step in the upscaling process from laboratory to production scale. (Item number has been updated from OTF-1200X-5L-R-CVD since March 2019)

Furnace Construction
  • Double shell casing with three cooling fans
  • High purity Alumina fibrous insulation for max. energy efficiency
  • DC Gear motor drives quartz tube with variable speed 0 - 10 RPM
  • The furnace can be electrically tilted up to 30°
  • Split cover enables faster cooling and easy operation.
  • All electric components are UL or Met recognized and ready to pass any safety test worldwide
Heating Zone length
  • Three zones: (600mm, 24" in total)
    • Zone 1: 150 mm  ( 6")
    • Zone 2: 300mm  ( 12")
    • Zone 3: 150 mm ( 6")
  • Constant temperature zone: 450 mm within +/- 2 ºC if two zones are at the same temperature.
Processing tube & Flange
  • Fused quartz tube (one is included)
  • Dimension:  130 mm O.D. x 120 mm I.D. x 1200 mm L + 60 OD mm (two ends )
    • Click the pics below to see details about the furnace's processing tube
  Four Mixing Blades                         Dimension
  • One pair of 60mm SS sealing flange with needle valves and the rotatable gas connector  is included for immediate use      
Gas Fittings
Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting:  Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

  • 1100°C for continuously

  • 1200°C Max for < 1 hours

Optional Temperature Controllers         
  • Three PID digital temperature controllers with 30 programmable segments
  • RS485 port is built in to connect PC for remote control
  • Please click the picture to the left for ordering the software and chip at extra cost.
Temperature Uniformity
 +/- 1°C in heating Zone
Three Omega K type 3mm OD x 6" L with high-temperature tolerance (220°C) connector
Tube rotating Speed
0 - 10 RPM variable
Furnace tilt angle
0 - 30°
Chamber pressure
10-2 torr
 Production yield
 2 kg per batch
Vacuum and Filters
  • One heavy-duty mechanical vacuum pump  with Exhaust Filter  are  included 
  • One cold vacuum trap is included to avoid CVD contaminating the vacuum pump.
Gas Delivery System
  • Four channel precision gas mixing and delivery system with Touch Screen  is included for 1-4 kinds of gasses CVD
  • Note:  If using flammable gas in the system,  It must be placed in a fume hood with the suitable gas detector. You must get approved by professional safety personnel.
 4 KW Max
 208 - 240V single phase (30 A Breaker required)
 Warranty & Certificate One year limited warranty (consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, replacements are available at related products below.) 
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: software is only compatible with MTI’s Yudian Temperature Controller

  • CE Certified
  • NRTL (UL61010)  or CSA certification is available at extra cost. ( please click marks below to learn details )
 Furnace dimension
  With Lid Open With Lid Closed
Tilt At 0° 34° 34°
Length 60" 60" 60" 60"
Width 35" 35" 24" 24"
Height 66.5" 74" 58" 68"
 Net Weight
   130 kg   
 Shipping Weight &  Dimension
  • 600 lbs
  • 48"x40"x80"
Operation Video


Application Notes
  • The tube furnace with quartz tube is designed for use under vacuum and low pressure < 0.2 bars / 3 psi 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

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