CMT-SR1000N

4 Point Probe System / Sheet resistance system

The CMT-SR1000N is a measurement system for Sheet Resistance and Resistivity of Wafer, LCD, ITO, Solar cell, Fuel cell samples.  Measurement is simply completed by pressing the START BUTTON only, and the measurement value is displayed on the LCD display window of the system.

1. Features
	Automatic contact system(Center 1 point)
	Automatic range selection
	Data communication port & software
2. Configuration
	The system consists of the following components.
	4-point probe head unit
	Z-axis robot arm
	Membrane keyboard panel
	LCD display window
	Data communication port
	Data download Software
	Standard accessories
	- Power cable  - Data communication cable  - Operating & service manual
3. Specifications
	Sheet resistance measurement
	- Measuring method : Contacted by 4-point probe - Measuring range : 1 mohm/sq ∼ 2 Mohm/sq - Measuring point : Center 1 point
	Resistivity measurement
	- Measuring method : Contacted by 4-point probe (input thickness) - Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm (VLSI standard wafer) - Measuring point : Center 1 point
	Current source
	- 10nA to 100mA - DVM 0V to 2,000mV - Accuracy: 0.2 %
	Measurement accuracy
	- ±0.5 % (standard wafer, when 23°C)
	Four point probe (Jandel Eng.)
	- Pin spacing : 20 mils ∼ 50 mils - Pin Load : 10 gram/pin ∼ 250 gram/pin - Pin radius : 12.5 micron ~ 500 micron
	Software
	- Windows 98/XP/NT Version - Data save & load - Data printout - Use RS232C Communication Port
4. Specimen
	Circle type (wafer) : max 8"
	Rectangular type : max 140 mm × 140 mm
5. Measuring time
	Approx. 3 ± 1 sec/point
6. Software
	Operating personal computer : IBM PC/AT compatible
	Connect com port of PC and data com port of CMT-SR1000N
	Data save & load
	Data printout
7. Utility requirements
	Power requirements
	- Line voltage : AC 110V or 220V ± 10%  - Electric power : 40 W, 500 mA  - Line frequency : 60 Hz
8. Outside Dimension
	254mm(W) × 562mm(D) × 250mm(H)
9. Operating environment
	Temperature range : 23°± 1°C
	Relative humidity : 30 % ∼ 70 %
	Avoid placing the system near a source of RFI, vibration and sources of gas.
	Avoid large changes in temperature.