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8.5" Quartz Tube Furnace with Water Cooling Flanges (1100C , 24" heating zone) - GSL-1100X-8.5

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Description

GSL-1100X-8.5 is a single heating zone with an 8.5" quartz tube. The heating temperature is up to 1100°C. The hinged type vacuum flanges with water cooling ports built-in. It is widely used for materials or chemical lab to sinter and anneal materials or semiconductor wafers under vacuum or other gases condition. The furnace is controlled by an intelligent temperature controller with an accuracy of +/-1°C and 30 programmable segments. 
 
SPECIFICATIONS:
Fused quartz tube size 216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L)
Furnace structure
  • Double-layer steel casing.
  • Four cooling fans are built inside to keep the temperature of the outside case < 60ºC
  • High purity alumina fibrous insulation for max energy saving.
  • Two foam ceramic thermal blocks are included to block heat radiation
  • Hinged type and water cold flange for loading sample easy.

                        

Input voltage 208 - 230VAC Single phase
power 8kW (50Amps Air Breaker is required)
Heating element NiCrAl Resistance Wire
Working Temperature
  • Max. heating temperature: 110 0°C
  • Continuous working temperature: 400 -1050°C
  • Max. heating/cooling rate: 20°C/min
  • Recommended heating/cooling rate: 10°C/min Max.
  • Typical temperature profile at 800°C (click picture below to see detail)
Heating zone
  • Total heating zone length: 600mm (24'')
  • constant temperature zone: 200mm within +/-1°C, and  300mm within +/-5°C
Temperature Controller
  • One Precision digital controller with PID function and 30 segments programmable
  • A secondary temperature monitor has the function of protection from over-temperature and broken thermocouple
  • K type thermocouple
  • Temperature accuracy: +/-1°C
  • Advanced Temperature Control (Optional)

                     

Vacuum & Fitting Ports
  • One pair of hinged type stainless steel vacuum seal flange with water cooling ( see Pic.1 )
  • One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose fittings, KF40 vacuum port, and 1/4'' feedthrough (see Pic. 2 and Pic. 3). Vacuum pressure limit: depending on the vacuum pump. (Usually 10-2 torr by the mechanical pump).
           Pic.1    Pic. 2            Pic. 3                              
Water Chiller (Optional)
  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately here) to save water.   
Product dimension 1000L x 680W x 920 H,  mm
Net weight 250Kg
Shipping dimension 60" x 60" x 55"
Shipping weight 350Kg
Warranty One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance
  
  • CE Certified
  • NRTL or CSA certification is available upon request.
Application Notes
                    Click here to learn the installation of a gas regulator
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  •  Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM for reducing thermal shocks to the tube.
  • Please use the manual torque wrench to tighten all flange screws to avoid overpressure incidents. The recommended torque is 45 inch-lbs at max.
Demo Video

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