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Enquriy

900°C 8.5" I.D. Hi-Vac. Vertical Chamber Furnace w/ Water Cold Flange & Window - VBF-900X-S8

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Description

VBF-900X-S8 is a high vacuum furnace with an 8.6" ID x 13.4"L S310 stainless steel chamber, water cold flanges, and observation window,  which can achieve a vacuum of 10-6 via Torr turbopump. It is designed for annealing semiconductor wafers (up to 8") under vacuum or inert gas atmospheres with a temperature up to 900°C. 

SPECIFICATIONS

Power

  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  • 8 KW max. 
  • Note: Power cable included but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab requirements

Working Temperature

  • <= 800°C continuously
  • Max. 900°C, < 30 minutes
  • Temperature Uniformity: +/- 2°C

Heating Rate

  • Max. 10°C/ min
  • Recommended: 10°C/ min

Heating Chamber


  • Two heating Modules via High-quality Ni-Cr-Al resistance wire for better temperature uniformity
  • S310 refractory stainless steel chamber with the dimension of 9" O.D. x 8.6" I.D x 23" H
  • Water cold vacuum-sealed flange with KF25 Vac. port with valve and gas inlet &outlet valves (Pic.1)
  • Quartz thermal block is included
  • Mechanical vacuum gauge is built-in
  • Vacuum level: 10-6 torr by turbopump and 10-3 by rotary pump ( Click Pic. 2- 4 to order the pump )
  Pic. 1     Pic. 2    Pic. 3   Pic. 4
Temperature Controller      
  • Two programmable temperature controllers are included
  • Programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • THE Default DB9 PC communication port and software are included for PC operation.
  • Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy

Options

  • A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C.  16L/min water flow required. Please click the picture below left to order the water chiller (Pic. 1)
  • Digital Pressure vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. (Click Pic. 2 to order)
  • You may choose a gas mixer to deliver multiple gasses with precision flow rate control (click Pic. 3) 
  • This furnace can be modified to a verticle hydrogen furnace at an extra cost. (Pic. 4)
  • Pic. 1Pic. 2Pic. 3 Pic. 4

Overall Dimensions

     (click picture to see details)

Net Weight

100 kg

Shipping Weight

250 lbs

Shipping Volume

45"(L) x 28"(W) x 35"(H) 


Warranty

  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

Compliance
  

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.

Warning  


Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
  • A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes undergoing deformations under vacuum.
  • The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks

Operation Demo Video

   

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