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Exhaust Filters

Adixen® (Pfeiffer) Oil Mist Eliminators

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Fiberglass Element KF (QF) Flanged Inlet

Manufactured by Adixen(Pfeiffer) for their oil-sealed mechanical pumps.

  • Can retain oil droplets smaller than 1 micron in diameter
  • An internal over pressure valve prevents exceeding the maximum permissible exhaust pressure

Chemical and Chemical Plasma Series

  • For mechanical pumps
  • Pump-aggressive gases encountered in plasma etching
  • Oil that condenses in the second group does not recycle back to the pump but remains in the mist eliminator's body
  • Sight glass enables operator to monitor the quantity of oil retained

Hermetic Series

  • For hermetically sealed mechanical pumps
  • Made of stainless steel
  • Helium leak checked to extremely low leak rates by Adixen(Pfeiffer) before shipping
  • Use when pumping precious or exotic gases in a closed loop


  • All mist eliminators listed below with KF ports come with one each of the following: KF clamp, and KF centering ring.
  • Element Included with Oil Mist Eliminators

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