Adixen® (Pfeiffer) Oil Mist Eliminators

Manufactured by Adixen(Pfeiffer) for their oil-sealed mechanical pumps.

• Can retain oil droplets smaller than 1 micron in diameter
• An internal over pressure valve prevents exceeding the maximum permissible exhaust pressure

Chemical and Chemical Plasma Series

• For mechanical pumps
• Pump-aggressive gases encountered in plasma etching
• Oil that condenses in the second group does not recycle back to the pump but remains in the mist eliminator's body
• Sight glass enables operator to monitor the quantity of oil retained

Hermetic Series

• For hermetically sealed mechanical pumps
• Made of stainless steel
• Helium leak checked to extremely low leak rates by Adixen(Pfeiffer) before shipping
• Use when pumping precious or exotic gases in a closed loop

NOTE:

• All mist eliminators listed below with KF ports come with one each of the following: KF clamp, and KF centering ring.
• Element Included with Oil Mist Eliminators