ALD Reactant Delivery Systems (RDS) Designs

The Kurt J. Lesker Reactant delivery system for ALD 8000 shown with MFCs, valves, and gas lines (top bays) and pumping/LN2 trapping (bottom bays)

Features

• Designed to cover a wide range of delivery requirements
• RDS available for solid, liquid, or vapor sources
• High and low vapor pressure source capabilities
• Various metering options, including mass flow controllers
• Bubblers available
• Computer-controlled heated delivery lines available

Example Gas Delivery Schematics

Lesker ALD Reactant Delivery System (RDS) Designs