Phone(+65) 6284 3818 | sales@premier-sols.com | Enquriy |
EQ-GSL-3F-PTFE is a three-channel anti-corrosion gas mixing & delivery system. All parts coming in contact with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.
Specifications
Floating meter | Three anti-corrosive Floating Flow-meter made of PTFE material with s flowing rates of 10 - 1000 mL/min. |
Valves | Three needle valves made of PTFE material which controls gas outlet on the front panel |
Gas Mixing Tank |
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Pipe fitting |
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Mobile Station |
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Shipping |
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Warranty |
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Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more: |
Application Notes |
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Operation Instruction | Operation Manual |